F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi
{"title":"用于EUV和软x射线光学的cr基干涉涂层的最新进展","authors":"F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi","doi":"10.1364/OIC.2019.FB.1","DOIUrl":null,"url":null,"abstract":"We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Recent advances in Cr-based interference coatings for EUV and soft x-ray optics\",\"authors\":\"F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi\",\"doi\":\"10.1364/OIC.2019.FB.1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.FB.1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.FB.1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Recent advances in Cr-based interference coatings for EUV and soft x-ray optics
We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
