Analysis on breakdown characteristics of triple-electrode switch in vacuum

Aiming at the system of triple-electrode switch, the fluid-chemistry model of plasma is established based on the particles' diffusion, collision, ionization and excitation and the finite element method. The micro process of self-breakdown of triple-electrode switch system is simulated in vacuum and SF6. The simulation results clearly revealed that the physical process from initial discharge to plasma channel formed. The plasma channel has more electron number in vacuum compared with it in SF6, and the electron temperature is lower. It lays a theoretical foundation for accurately and fully revealing the physical mechanism of the triple-electrode switch system and helping to find the method to improve the performance of the system.