激光诱导反向转移的二维材料微尺度沉积(会议报告)

M. Praeger, R. Eason, B. Mills
{"title":"激光诱导反向转移的二维材料微尺度沉积(会议报告)","authors":"M. Praeger, R. Eason, B. Mills","doi":"10.1117/12.2541964","DOIUrl":null,"url":null,"abstract":"2D materials such as graphene have great potential as the basis for novel optoelectronic devices. Typically, 2D materials are produced via chemical vapor deposition and therefore form continuous layers. Here Laser Induced Backwards Transfer (LIBT) is used to deposit pixels of 2D materials with precisely controlled size, shape and position. In LIBT, part of the laser energy that is absorbed in the donor substrate becomes kinetic energy imparted to the 2D material, causing localised transfer of 2D material onto the receiver. The capability to deposit high-quality intact 2D materials, in well-defined microscale pixels will eliminate costly and time-consuming lithographic processing. ABSTRACT (250 words for technical review) Laser Induced Backwards Transfer (LIBT)1 is a candidate for next generation additive manufacturing, especially for materials that are unsuited to more conventional methods. Broadening the range and complexity of materials that can be deposited will enable developments in material functionality e.g. for sensing applications, metamaterials and silicon photonics. Here we demonstrate LIBT as a means of achieving intact transfer of 2D materials (such as graphene and MoS2) onto a receiver substrate (which could be a silicon based electronic or photonic device). Typically, 2D materials are produced via chemical vapor deposition and form featureless, continuous layers. In LIBT, part of the laser pulse energy that is absorbed in the donor substrate becomes kinetic energy imparted to the 2D material, this causes localised detachment and transfer of the 2D material onto the receiver. Here, the transfer region is defined by beam-shaping using a Digital Micromirror Device (DMD)2 allowing precise control over the size, shape and positioning of the 2D material deposition. We use high resolution imaging to observe removal of 2D material from the donor substrate and present Raman analysis of the receiver substrate, verifying both that transfer has occurred and that the 2D materials retain their high quality and viability for end applications. [1] Feinaugle, M. et al., \"Laser-induced backward transfer of nanoimprinted polymer elements,\" Applied Physics A 122(4), 1-5 (2016). [2] Heath, D. J. et al., \"Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films,\" Optical Materials Express 5(5), 1129-1136 (2015).","PeriodicalId":107014,"journal":{"name":"Laser 3D Manufacturing VII","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microscale deposition of 2D materials via laser induced backwards transfer (Conference Presentation)\",\"authors\":\"M. Praeger, R. Eason, B. Mills\",\"doi\":\"10.1117/12.2541964\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"2D materials such as graphene have great potential as the basis for novel optoelectronic devices. Typically, 2D materials are produced via chemical vapor deposition and therefore form continuous layers. Here Laser Induced Backwards Transfer (LIBT) is used to deposit pixels of 2D materials with precisely controlled size, shape and position. In LIBT, part of the laser energy that is absorbed in the donor substrate becomes kinetic energy imparted to the 2D material, causing localised transfer of 2D material onto the receiver. The capability to deposit high-quality intact 2D materials, in well-defined microscale pixels will eliminate costly and time-consuming lithographic processing. ABSTRACT (250 words for technical review) Laser Induced Backwards Transfer (LIBT)1 is a candidate for next generation additive manufacturing, especially for materials that are unsuited to more conventional methods. Broadening the range and complexity of materials that can be deposited will enable developments in material functionality e.g. for sensing applications, metamaterials and silicon photonics. Here we demonstrate LIBT as a means of achieving intact transfer of 2D materials (such as graphene and MoS2) onto a receiver substrate (which could be a silicon based electronic or photonic device). Typically, 2D materials are produced via chemical vapor deposition and form featureless, continuous layers. In LIBT, part of the laser pulse energy that is absorbed in the donor substrate becomes kinetic energy imparted to the 2D material, this causes localised detachment and transfer of the 2D material onto the receiver. Here, the transfer region is defined by beam-shaping using a Digital Micromirror Device (DMD)2 allowing precise control over the size, shape and positioning of the 2D material deposition. We use high resolution imaging to observe removal of 2D material from the donor substrate and present Raman analysis of the receiver substrate, verifying both that transfer has occurred and that the 2D materials retain their high quality and viability for end applications. [1] Feinaugle, M. et al., \\\"Laser-induced backward transfer of nanoimprinted polymer elements,\\\" Applied Physics A 122(4), 1-5 (2016). [2] Heath, D. J. et al., \\\"Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films,\\\" Optical Materials Express 5(5), 1129-1136 (2015).\",\"PeriodicalId\":107014,\"journal\":{\"name\":\"Laser 3D Manufacturing VII\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-02-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser 3D Manufacturing VII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2541964\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser 3D Manufacturing VII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2541964","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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摘要

石墨烯等二维材料作为新型光电器件的基础具有巨大的潜力。通常,二维材料是通过化学气相沉积产生的,因此形成连续的层。在这里,激光诱导反向转移(LIBT)用于沉积具有精确控制尺寸,形状和位置的二维材料像素。在LIBT中,在供体衬底中吸收的部分激光能量成为传递给二维材料的动能,导致二维材料局部转移到接收器上。在定义明确的微尺度像素中沉积高质量完整2D材料的能力将消除昂贵且耗时的光刻工艺。摘要(250字技术评论)激光诱导反向转移(LIBT)1是下一代增材制造的候选材料,特别是对于不适合更传统方法的材料。扩大可沉积材料的范围和复杂性将促进材料功能的发展,例如传感应用、超材料和硅光子学。在这里,我们展示了LIBT作为一种实现二维材料(如石墨烯和MoS2)完整转移到接收器衬底(可以是硅基电子或光子器件)的手段。通常,二维材料是通过化学气相沉积产生的,形成无特征的连续层。在LIBT中,在供体衬底中吸收的部分激光脉冲能量成为传递给二维材料的动能,这导致二维材料局部脱离并转移到接收器上。在这里,通过使用数字微镜设备(DMD)2进行光束整形来定义传递区域,从而精确控制二维材料沉积的大小、形状和定位。我们使用高分辨率成像来观察2D材料从供体基板上的去除,并对接收基板进行拉曼分析,验证了转移已经发生,并且2D材料在最终应用中保持了高质量和可行性。[1]张建军,张建军,张建军,等。激光诱导纳米印迹聚合物的逆向转移[j] .光子学报,2016,32(4):1-5。[2]张建军,张建军,张建军,等。基于微反射镜的激光脉冲成形研究进展[j] .光子学报,2015(5),379 - 379(2015)。
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Microscale deposition of 2D materials via laser induced backwards transfer (Conference Presentation)
2D materials such as graphene have great potential as the basis for novel optoelectronic devices. Typically, 2D materials are produced via chemical vapor deposition and therefore form continuous layers. Here Laser Induced Backwards Transfer (LIBT) is used to deposit pixels of 2D materials with precisely controlled size, shape and position. In LIBT, part of the laser energy that is absorbed in the donor substrate becomes kinetic energy imparted to the 2D material, causing localised transfer of 2D material onto the receiver. The capability to deposit high-quality intact 2D materials, in well-defined microscale pixels will eliminate costly and time-consuming lithographic processing. ABSTRACT (250 words for technical review) Laser Induced Backwards Transfer (LIBT)1 is a candidate for next generation additive manufacturing, especially for materials that are unsuited to more conventional methods. Broadening the range and complexity of materials that can be deposited will enable developments in material functionality e.g. for sensing applications, metamaterials and silicon photonics. Here we demonstrate LIBT as a means of achieving intact transfer of 2D materials (such as graphene and MoS2) onto a receiver substrate (which could be a silicon based electronic or photonic device). Typically, 2D materials are produced via chemical vapor deposition and form featureless, continuous layers. In LIBT, part of the laser pulse energy that is absorbed in the donor substrate becomes kinetic energy imparted to the 2D material, this causes localised detachment and transfer of the 2D material onto the receiver. Here, the transfer region is defined by beam-shaping using a Digital Micromirror Device (DMD)2 allowing precise control over the size, shape and positioning of the 2D material deposition. We use high resolution imaging to observe removal of 2D material from the donor substrate and present Raman analysis of the receiver substrate, verifying both that transfer has occurred and that the 2D materials retain their high quality and viability for end applications. [1] Feinaugle, M. et al., "Laser-induced backward transfer of nanoimprinted polymer elements," Applied Physics A 122(4), 1-5 (2016). [2] Heath, D. J. et al., "Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films," Optical Materials Express 5(5), 1129-1136 (2015).
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Front Matter: Volume 11271 Microscale deposition of 2D materials via laser induced backwards transfer (Conference Presentation)
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