{"title":"生长CVD石墨烯上沉积h2o基Al2O3的研究","authors":"Wenrong Wang, C. Liang, Tie Li, Yuelin Wang","doi":"10.1109/3M-NANO.2013.6737390","DOIUrl":null,"url":null,"abstract":"In this paper, graphene films were synthesized by chemical vapor deposition. Raman spectra and transmission electron microscope indicated the graphene films were few-layer. Al<sub>2</sub>O<sub>3</sub> films were grown directly onto the surface of graphene transferred on SiO<sub>2</sub>/Si by H<sub>2</sub>O-based atomic layer deposition method. Experiments revealed that the distribution of physically adsorbed H<sub>2</sub>O molecules on the surface of graphene decided the morphology of Al<sub>2</sub>O<sub>3</sub> film, and the O/Al ratio was close to stoichiometric condition of 1.5.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Studies on H2O-based Al2O3 deposited on as-grown CVD graphene\",\"authors\":\"Wenrong Wang, C. Liang, Tie Li, Yuelin Wang\",\"doi\":\"10.1109/3M-NANO.2013.6737390\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, graphene films were synthesized by chemical vapor deposition. Raman spectra and transmission electron microscope indicated the graphene films were few-layer. Al<sub>2</sub>O<sub>3</sub> films were grown directly onto the surface of graphene transferred on SiO<sub>2</sub>/Si by H<sub>2</sub>O-based atomic layer deposition method. Experiments revealed that the distribution of physically adsorbed H<sub>2</sub>O molecules on the surface of graphene decided the morphology of Al<sub>2</sub>O<sub>3</sub> film, and the O/Al ratio was close to stoichiometric condition of 1.5.\",\"PeriodicalId\":120368,\"journal\":{\"name\":\"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2013.6737390\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2013.6737390","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Studies on H2O-based Al2O3 deposited on as-grown CVD graphene
In this paper, graphene films were synthesized by chemical vapor deposition. Raman spectra and transmission electron microscope indicated the graphene films were few-layer. Al2O3 films were grown directly onto the surface of graphene transferred on SiO2/Si by H2O-based atomic layer deposition method. Experiments revealed that the distribution of physically adsorbed H2O molecules on the surface of graphene decided the morphology of Al2O3 film, and the O/Al ratio was close to stoichiometric condition of 1.5.
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