DP4T射频开关用虚拟仪器的MOSFET表征过程综述

V. Srivastava, K. S. Yadav, G. Singh
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引用次数: 1

摘要

随着人们对射频开关的兴趣日益浓厚,利用CMOS电路技术进行无线通信系统的需求越来越大。传统的n-MOS单极双掷(SPDT)开关具有良好的性能,但仅适用于单一工作频率。对于多工作频率,要通过多天线系统(即MIMO系统)发送或接收信息,就需要一种新的射频开关,该开关应能够在多天线和多频率下工作,并最大限度地减少信号失真和功耗。我们已经提出了一种双极四掷(DP4T)射频开关,在这篇研究文章中,我们正在讨论用虚拟仪器表征MOSFET的过程。描述生长或沉积在半导体上的氧化物和导体层的过程是通过研究由导体(金属)-绝缘体-半导体层组成的MOS电容器的特性来实现的,该电容器用于RF CMOS作为开关。对于由金属-二氧化硅-具有厚氧化物的硅层构成的电容器,用光学方法测量。计算出的一些材料参数与期望值有偏差。这些误差可能是由于几个因素造成的,例如由于与晶圆接触不当而导致探头的电容可能偏移,这是通过使用LCR(电感-电容-电阻)计在视觉工程环境编程(VEE Pro,安捷伦产品)的帮助下测量的。
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Characterization Process of MOSFET with Virtual Instrumentation for DP4T RF Switch - A Review
With the increasing interest in radio frequency switch by using the CMOS circuit technology for the wireless communication systems is in demand. A traditional n-MOS Single-Pole Double-Throw (SPDT) switch has good performances but only for a single operating frequency. For multiple operating frequencies, to transmitting or receiving information through the multiple antennas systems, known as MIMO systems, it a new RF switch is required which should be capable of operating with multiple antennas and frequencies as well as minimizing signal distortions and power consumption. We already have proposed a Double-Pole Four-Throw (DP4T) RF switch and in this research article we are discussing a process for the characterization of the MOSFET with Virtual Instrumentation. The procedure to characterize oxide and conductor layers that are grown or deposited on semiconductors is by studying the characteristics of a MOS capacitor that is formed of the conductor (Metal)-insulator-semiconductor layers for the purpose of RF CMOS as a switch is presented. For a capacitor formed of Metal-silicon dioxide-silicon layers with a thick oxide measured opti-cally. Some of the calculated material parameters are away from the expected values. These errors might be due to several factors such as a possible offset capacitance of the probes due to improper contact with the wafer which is measured by using the LCR (Inductance-Capacitance-Resistance) meter with the help of Visual Engineering Environment Programming (VEE Pro, a Agilent product).
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