栅极氧化物降解对SRAM动态和静态可写性的影响

V. Chandra, R. Aitken
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引用次数: 4

摘要

SRAM阵列的低电压运行是降低嵌入式微处理器功耗的关键。操作的最小电压Vmin可以被写故障、读干扰故障、访问故障和/或保留故障的任何组合所限制。其中,在50nm以下的工艺中,写入失败通常是主要的Vmin限制因素。此外,当前一代晶体管具有高k金属栅极(HKMG),由于较高的电场应力水平,这些栅极容易退化。由于动态写失败的增加,以及随着电源电压的降低,静态写失败的增加,导致Vmin的降低。我们表明,在给定的电源电压下,存在一个临界击穿电阻(Rcrit),在这个电压下,SRAM写故障从动态限制转变为静态限制。对于32nm低功耗SRAM,当电源电压从1V降低到0.7V时,Rcrit值增加了约9X。此外,我们发现常用的SRAM写辅助(WA)技术并不能降低Rcrit,只有当击穿电阻Rsbd大于Rcrit时才能提高写能力。
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On the impact of gate oxide degradation on SRAM dynamic and static write-ability
Low voltage operation of SRAM arrays is critical in reducing the power consumption of embedded microprocessors. The minimum voltage of operation, Vmin, can be limited by any combination of write failure, read disturb failure, access failure and/or retention failure. Of these, the write failure is often observed as the major Vmin limiter in sub-50nm processes. In addition, the current generation transistors have high-k metal gate (HKMG) and these are prone to degradation due to higher level of electric field stress. The degradation increases Vmin due to increase in dynamic write failures and eventually, static write failures as the supply voltage decreases. We show that there exists a critical breakdown resistance (Rcrit) for a given supply voltage at which the SRAM write failure transitions from being dynamically limited to statically limited. For a 32nm low-power SRAM, the value of Rcrit increases by ∼9X as the supply voltage reduces from 1V to 0.7V. Further, we show that the commonly used SRAM write-assist (WA) techniques do not lower Rcrit and can only improve the write-ability when the breakdown resistance, Rsbd, is larger than Rcrit.
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