MEMS摩擦学表面改性研究

P. Cuong, Tran Duc Quy, E. Yoon
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引用次数: 2

摘要

本文研究了复合表面改性及其对Si(100)平面摩擦学性能的影响。首先,利用光刻和DRIE(深度反应离子蚀刻)制造技术在硅晶片上制造微图案。其形态包括微尺度上的柱状和通道状。其次,分别用薄类金刚石(DLC)或全氟聚醚(ZDOL)薄膜涂覆硅微图案。然后在微观尺度上评估了表面的摩擦和磨损性能。结果表明,由于接触面积减小,与硅平面相比,图案表面的摩擦力减小。此外,在这项工作中,微图案和摩擦学薄膜(如DLC和ZDOL)的结合在减少硅平面的摩擦力和磨损方面非常有效,并且将被证明是微型器件(如MEMS)摩擦学应用的潜在候选者。
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A study on surface modification for tribological application in MEMS
This paper presents an investigation on combined surface modifications and their effects to tribological properties of Si (100) flat surfaces. At first, micro-patterns were fabricated on Si wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterns include of pillars and channels shape in micro-scales. Secondly, the Si micro-patterns were coated by thin diamond-like carbon (DLC) or Perfluoropolyether (ZDOL) film, individually. The surfaces were then evaluated for the friction and wear properties at micro-scale. Results showed that the patterned surface exhibited reduced friction force compared to the Si flat surfaces, owing to reduced area of contact. Further, the combination of micro-patterns and tribology films such as DLC and ZDOL in this work is very effective in reducing frictional force and wear of the Si flat surface, and would be proved as a potential candidate for tribological applications in miniaturized devices like MEMS.
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