一种超低电压MTCMOS/SIMOX栅极阵列

M. Urano, T. Douseki, T. Hatano, H. Fukuda, M. Harada, T. Tsuchiya
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引用次数: 1

摘要

采用多阈值CMOS (MTCMOS)电路和SIMOX分离技术(一种绝缘体上硅(SOI)技术)开发了一种超低电压门阵列。采用0.25-/spl μ m MTCMOS/SIMOX工艺制备了250k基元栅极阵列。栅极延迟时间在1.2 V时为140 ps,在0.5 V时为470 ps。制作了30kg的测试电路,在0.58 V下获得了与3.3 V(即25 MHz)下相同的工作速度0.5-/spl mu/m,功耗降低到1/100。在0.76 V时,工作速度为40 MHz。
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An ultra-low-voltage MTCMOS/SIMOX gate array
An ultra-low-voltage gate array has been developed using a multi-threshold CMOS (MTCMOS) circuit and separation by implanted oxygen (SIMOX) technology, which is a type of a silicon-on-insulator (SOI) technology. A 250-K basic-cell gate array was fabricated using 0.25-/spl mu/m MTCMOS/SIMOX technology. The gate delay time is 140 ps at 1.2 V and 470 ps at 0.5 V. A 30-KG test circuit was fabricated and the same operating speed as that of 0.5-/spl mu/m at 3.3 V (i.e., 25 MHz) was obtained at 0.58 V with the power consumption reduced to 1/100. At 0.76 V, the operating speed was 40 MHz.
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