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引用次数: 11

摘要

本文介绍了一个由技术计算机辅助设计工具组成的半导体制造企业虚拟制造系统。该虚拟工厂对于先进工艺技术的开发、工艺可制造性的评价和现有制造工艺的改进是非常有效的。通过使用计算机辅助,可以在实际硅加工之前评估目标技术的设计和可制造性,并且公司可以在制造中建立竞争优势。讨论了计算机辅助设计工具的技术限制和集成电路制造中采用虚拟制造系统的管理责任。
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Organizational visions of virtual manufacturing: sociotechnical aspects of adopting technology computer-aided design based manufacturing process
This paper describes a virtual manufacturing system consisting of technology computer-aided design tools for semiconductor manufacturing companies. This virtual factory is shown to be very efficient for development of advanced process technology evaluation of process manufacturability, and improvement of existing fabrication processes. By using computer aids, the design and manufacturability of the target technology can be evaluated prior to actual silicon processing, and a company can establish a competitive edge in manufacturing. The technical limitations of computer-aided design tools and the managerial responsibilities in adopting a virtual manufacturing system for integrated circuits manufacturing are also discussed.
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