MNOS记忆迟滞的模拟——层厚度的影响

K. Molnár, Z. Horváth
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引用次数: 2

摘要

通过对氧化氮层电流差的积分,模拟了MNOS的记忆滞后曲线。研究了氧化层和氮层厚度以及电荷质心深度的影响。结果表明,最佳的氧化层厚度约为2 nm。较薄的氮化物层降低了注入电荷的效率。结果表明,随着电荷质心深度的增加,可能的最高存储器窗宽单调减小。
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Simulation of MNOS memory hysteresis - Effect of layer thicknesses
MNOS memory hysteresis curves are simulated by integrating the difference of the current via the oxide and nitride layer. The effect of the oxide and nitride thickness as well as the depth of charge centeroid is studied. The results indicate that the optimal oxide thickness is about 2 nm. A thin nitride layer decreases the efficiency of the injected charge. It has been obtained that the possible highest memory window width decreases monotonically with increasing depth of charge centroid.
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