结合气相，结构和光学诊断在脉冲激光沉积过程中的原位反馈和控制

{"title":"结合气相，结构和光学诊断在脉冲激光沉积过程中的原位反馈和控制","authors":"S. Harris, C. Rouleau, A. Puretzky, S. Yun, L. Liang, O. Dyck, T. Berlijn, G. Eres, G. Duscher, Austin Houston, Yu‐Chuan Lin, M. Yoon, Kai Xiao, D. Geohegan","doi":"10.1117/12.2650571","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":391491,"journal":{"name":"Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Combining gas-phase, structural, and optical diagnostics for in situ feedback and control during pulsed laser deposition\",\"authors\":\"S. Harris, C. Rouleau, A. Puretzky, S. Yun, L. Liang, O. Dyck, T. Berlijn, G. Eres, G. Duscher, Austin Houston, Yu‐Chuan Lin, M. Yoon, Kai Xiao, D. Geohegan\",\"doi\":\"10.1117/12.2650571\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":391491,\"journal\":{\"name\":\"Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-03-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2650571\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2650571","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}