Y. Shyrokyi, Andrey Sysoiev, Yuliia Panchenko
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摘要

研究的主题是等离子体介质中纳米结构形成过程的数学模型。以往的研究表明,纳米结构的形成需要一定的温度、温度的升高速率和热应力。加工材料的近表面层所需的深度是最有利于纳米结构形成的,这取决于温度应力梯度最高的地方。以铜表面离子等离子体处理为例,确定了获得纳米结构的工艺参数。这项工作的任务是,通过改变离子的能量,沿着材料的深度选择场的位置,以在材料的给定平面上产生必要的高温梯度。因此,可以在大量材料中产生显著的热应力和纳米结构。所使用的方法是分析的。在我们的工作中,建立了一个数学模型来描述离子等离子体表面处理过程中温度场的产生,并在氧离子处理铜的过程中进行了测试。该模型通过热物理、热机械、热疲劳、扩散、热化学、等离子体化学过程和碰撞实现等离子体流动和带电粒子随材料流动的联合作用。因此,所建立的模型将有助于更准确地确定工艺参数,以形成有利于纳米结构在加工材料表层稳定生长的条件。通过大量的计算,确定了铜表层温度对氧离子能量的依赖关系。在2.7∙106 ~ 2.1∙108 A/m2的不同电流密度下,根据离子在不同作用时间下的渗透深度,计算了离子在表面层平面三层作用区的温度场。研究表明,离子热作用结束时达到最高表面温度。结论。得到的热应力值表明,在2.7∙106 a /m2电流密度下,氧离子作用深度为x=0.5λm,铜的表层有可能形成纳米结构。在电流密度为3∙107 a /m2时,x=0.5λm平面的温度梯度最大,计算出的最大温度应力为5∙108 N/m,证实了获得纳米结构的条件已经具备。但在2.1∙108 A/m2时,总温度升高,温度梯度减小,温度应力减小,不满足获得纳米结构的条件。获得的结果可用于开发在等离子体环境中生产纳米结构的技术,例如,在氧环境中通过离子等离子体处理铜。在等离子体环境中,例如,在氧环境中对铜进行离子等离子体处理。
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Теоретичне дослідження температурних полів міді при формуванні наноструктурних шарів у плазмовому середовищі
The subject of study is the mathematical model for thermal processes during the formation of nanostructures in a plasma medium. In previous studies, it was shown that for the appearance of nanostructures, it is necessary that there be a certain temperature, its rate of increase, and thermal stresses. The required depth of the near-surface layer of the processed material, which is most favorable for the formation of nanostructures, is determined where the highest temperature stress gradients occur. The current work determines the technological parameters for obtaining nanostructures during ion-plasma treatment of the copper surface, as an example. The task of this work, by changing the energy of the ions, is to choose the location of the fields along the depth of the material to generate the necessary high temperature gradients in the given planes of the material. Thus, significant thermal stresses, and hence nanostructures, can be created in a large volume of material. The method used is analytical. In our work, a mathematical model was developed to describe the generation of temperature fields during ion-plasma surface treatment and tested on the process of copper treatment with oxygen ions. In this model, the joint actions of plasma flows and flows of charged particles with materials are realized through thermophysical, thermomechanical, thermal fatigue, diffusion, thermochemical, plasma-chemical processes and collisions. Therefore, the developed model will contribute to a more accurate determination of technological parameters for the formation of conditions conducive to the stable growth of nanostructures in the surface layers of processed materials. Because of numerous calculations, the dependence of the temperature of the surface layer of copper on the energy of oxygen ions was determined. The temperature fields in the zone of action of ions for three levels of the plane of the surface layer are calculated depending on the depth of penetration of ions for different times of interaction and at different current densities from 2.7∙106 to 2.1∙108 A/m2. Studies have shown that the maximum surface temperature is reached at the end of the thermal action of the ion. Conclusions. The obtained values of thermal stresses showed the possibility of formation of nanostructures in the surface layer of copper under the action of oxygen ions at a depth of x=0.5λm at a current density of 2.7∙106 A/m2. For the x=0.5λm plane at a current density of 3∙107 A/m2, where the largest temperature gradients were found, the maximum temperature stresses were calculated, amounting to 5∙108 N/m, which confirms the creation of conditions for obtaining nanostructures. But at 2.1∙108 A/m2, the total temperature rises, and the temperature gradients decrease, which decreases temperature stresses and failure to meet the conditions for obtaining nanostructures. The results obtained can be used to develop a technology for the production of nanostructures in a plasma environment, for example, on copper by ion-plasma treatment in an oxygen environment.in a plasma environment, for example, on copper by ion-plasma treatment in an oxygen environment.
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