采用相位法测量单质量MEMS陀螺仪输出信号,提高其性能

A. Kovalev
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引用次数: 1

摘要

提出了一种基于信号相位分离而不是提取惯性质量二次振荡包络线的微机械陀螺仪角速度确定方法。理论和实验结果表明,该方法在原理上是可行的。与常用的振幅法相比,所提出的相位法具有一些优点。
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Phase Method for Measuring the output Signal of a Single-Mass MEMS Gyroscope as a Possibility of Improving its Performance
A method is proposed for determining the angular rate in a micromechanical gyroscope based on separation of the signal phase rather than extraction of the envelope of secondary oscillations of the inertial mass. The theoretical and experimental tests have shown the possibility of using this method to measure the angular rate in principle. The proposed phase method has some advantages over the commonly used amplitude method.
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