Sensitivity of improvement of quartz hydrogen sensor with novel designed heater

Catalytic combustion hydrogen gas sensors using quartz resonators have been developed to detect hydrogen gas leakage. In order to improve stability of its sensitivity, Au thin film was studied as a non-catalysis heater material. Around 50 Ω Au heaters, which is relatively low resistance value, were designed to be driven with single-supply op-amp. As a result of evaluating using the prototype sensor, the heaters with linear TCR same great as a Pt thin film were obtained. By controlling the temperature with the analog circuit, hydrogen sensitivity with high linearity was confirmed. As result, the effectiveness of the Au thin film heater was demonstrated.