基于双光子聚合的微透镜直接激光书写与表征

2021 26th Microoptics Conference (MOC) Pub Date : 2021-09-26 DOI:10.23919/MOC52031.2021.9598125

K. Vanmol, A. Kandeel, G. Y. Belay, H. Thienpont, H. Ottevaere, J. Van Erps

{"title":"基于双光子聚合的微透镜直接激光书写与表征","authors":"K. Vanmol, A. Kandeel, G. Y. Belay, H. Thienpont, H. Ottevaere, J. Van Erps","doi":"10.23919/MOC52031.2021.9598125","DOIUrl":null,"url":null,"abstract":"We present the characterization of micro-lenses that are fabricated with the technology of two-photon polymerization (2PP)-based direct laser writing. We fabricate multiple lenses with different exposure parameters, after which we use interferometric characterization tools to investigate their geometry and optical performance to optimize the fabrication strategy.","PeriodicalId":355935,"journal":{"name":"2021 26th Microoptics Conference (MOC)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Two-Photon Polymerization-based Direct Laser Writing and Characterization of Micro-Lenses for Optical Interconnect Applications\",\"authors\":\"K. Vanmol, A. Kandeel, G. Y. Belay, H. Thienpont, H. Ottevaere, J. Van Erps\",\"doi\":\"10.23919/MOC52031.2021.9598125\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present the characterization of micro-lenses that are fabricated with the technology of two-photon polymerization (2PP)-based direct laser writing. We fabricate multiple lenses with different exposure parameters, after which we use interferometric characterization tools to investigate their geometry and optical performance to optimize the fabrication strategy.\",\"PeriodicalId\":355935,\"journal\":{\"name\":\"2021 26th Microoptics Conference (MOC)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 26th Microoptics Conference (MOC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/MOC52031.2021.9598125\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 26th Microoptics Conference (MOC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/MOC52031.2021.9598125","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文介绍了用双光子聚合(2PP)激光直接书写技术制备的微透镜的特性。我们制作了多个具有不同曝光参数的透镜，然后使用干涉表征工具研究了它们的几何形状和光学性能，以优化制作策略。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Two-Photon Polymerization-based Direct Laser Writing and Characterization of Micro-Lenses for Optical Interconnect Applications

We present the characterization of micro-lenses that are fabricated with the technology of two-photon polymerization (2PP)-based direct laser writing. We fabricate multiple lenses with different exposure parameters, after which we use interferometric characterization tools to investigate their geometry and optical performance to optimize the fabrication strategy.

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2021 26th Microoptics Conference (MOC)

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