{"title":"Beamlines","authors":"Takeo Watanabe","doi":"10.1002/9781119280453.ch5","DOIUrl":null,"url":null,"abstract":"Seven beamlines are operating in the NewSUBARU synchrotron facility. Four beamlines of BL-1, BL-3, BL-6 and BL11 have been constructed by 1999. Three new beamlines of BL-7, BL-9 and BL-10 become operational in 2000. Furthermore, BL3B beamline branches from the BL3 beamline propose for the usage of the EUVL microscope for the EUVL finished mask inspection. BL9B beamline branches from BL9 beamline propose for the usage of the advanced point diffraction interferometry for the test alignment of the EUVL imaging optics for practice use. The arrangement of the beamlines in the NewSUBARU synchrotron radiation facility is shown in Fig.1.","PeriodicalId":377286,"journal":{"name":"An Introduction to Synchrotron Radiation","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Beamlines\",\"authors\":\"Takeo Watanabe\",\"doi\":\"10.1002/9781119280453.ch5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Seven beamlines are operating in the NewSUBARU synchrotron facility. Four beamlines of BL-1, BL-3, BL-6 and BL11 have been constructed by 1999. Three new beamlines of BL-7, BL-9 and BL-10 become operational in 2000. Furthermore, BL3B beamline branches from the BL3 beamline propose for the usage of the EUVL microscope for the EUVL finished mask inspection. BL9B beamline branches from BL9 beamline propose for the usage of the advanced point diffraction interferometry for the test alignment of the EUVL imaging optics for practice use. The arrangement of the beamlines in the NewSUBARU synchrotron radiation facility is shown in Fig.1.\",\"PeriodicalId\":377286,\"journal\":{\"name\":\"An Introduction to Synchrotron Radiation\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"An Introduction to Synchrotron Radiation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1002/9781119280453.ch5\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"An Introduction to Synchrotron Radiation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/9781119280453.ch5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Seven beamlines are operating in the NewSUBARU synchrotron facility. Four beamlines of BL-1, BL-3, BL-6 and BL11 have been constructed by 1999. Three new beamlines of BL-7, BL-9 and BL-10 become operational in 2000. Furthermore, BL3B beamline branches from the BL3 beamline propose for the usage of the EUVL microscope for the EUVL finished mask inspection. BL9B beamline branches from BL9 beamline propose for the usage of the advanced point diffraction interferometry for the test alignment of the EUVL imaging optics for practice use. The arrangement of the beamlines in the NewSUBARU synchrotron radiation facility is shown in Fig.1.
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