多层结构及其制造设备

{"title":"多层结构及其制造设备","authors":"Y. Sobolev, Ksenia Yakovlevna Savinkova","doi":"10.52261/02346206_2021_3_117","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":425837,"journal":{"name":"Проблемы машиностроения и автоматизации","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MULTILAYER STRUCTURES AND EQUIPMENT OF ITS MANUFACTURING\",\"authors\":\"Y. Sobolev, Ksenia Yakovlevna Savinkova\",\"doi\":\"10.52261/02346206_2021_3_117\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":425837,\"journal\":{\"name\":\"Проблемы машиностроения и автоматизации\",\"volume\":\"43 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Проблемы машиностроения и автоматизации\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.52261/02346206_2021_3_117\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Проблемы машиностроения и автоматизации","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.52261/02346206_2021_3_117","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}