集成封装兼容铁氧体磁芯磁性器件的低温制造与表征

J.Y. Park, M. Allen
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引用次数: 49

摘要

研究了微型DC/DC转换器和其他电源应用中与有机(低温)电子封装兼容的集成磁性元件。采用聚合物/铁氧体复合芯制备了两种类型的电感,并在低温下沉积和图案化。所制电感的电感值在0.5 ~ 1.5 /spl mu/H范围内,q因子为17数量级。在所有情况下,聚合物填充铁氧体的掺入改善了集成电感的特性。
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Low temperature fabrication and characterization of integrated packaging-compatible, ferrite-core magnetic devices
Integrated magnetic components compatible with organic (low-temperature) electronic packaging for miniature DC/DC converters and other power supply applications are investigated. Two inductor types have been fabricated incorporating a polymer/ferrite composite core, deposited and patterned at low temperature. For the fabricated inductors, inductances in the 0.5-1.5 /spl mu/H range and Q-factors of the order of 17 are achieved. In all cases, the incorporation of the polymer filled ferrite improved the characteristics of the integrated inductors.
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