径向阵列均匀型氮化铝压电微机械超声换能器的设计与工艺

2021 Smart Systems Integration (SSI) Pub Date : 2021-04-27 DOI:10.1109/SSI52265.2021.9467017

C. Stoeckel, M. Melzer, Katja Meinel, M. Tavakolibasti, R. Forke, S. Zimmermann, T. Otto, H. Kuhn

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引用次数: 1

摘要

本文报道了一种基于氮化铝(AlN)的六径向对称阵列微机械超声换能器(PMUT)的设计、工艺及其在空气中的力学特性。PMUT由4018个单膜组成，谐振频率为3.4 MHz，准静态偏转为272 pm/V，谐振偏转高达71.3 nm/V。芯片上谐振频率的小标准偏差为47千赫。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array

This paper reports on design, technology and mechanical characterization in air of a piezoelectric aluminum nitride (AlN) based micromachined ultrasonic transducer (PMUT) with six radial symmetric arrays. The PMUT consists of 4018 single membranes with a resonance frequency of 3.4 MHz, a quasi-static deflection of 272 pm/V and a resonant deflection of up to 71.3 nm/V. The small standard deviation of the resonance frequency over the chip is 47 kHz.

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2021 Smart Systems Integration (SSI)

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