MSM光电探测器的位置依赖光电流强度

S. Yuan, Jianning Wang, Yumin Zhang, J. Krasinski
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引用次数: 2

摘要

实验发现,金属-半导体-金属(MSM)结构中的光电流强度与入射激光束的位置有很强的依赖性;然而,对于这一现象并没有令人满意的解释。利用设备模拟器ATLAS对这一过程进行了仿真,结果与实验结果吻合较好。我们还研究了材料性能和外部偏置电压等各种因素对电流密度的影响,发现光电流随这些参数的变化显著。
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Position dependent photocurrent intensity of MSM photodetectors
It was found experimentally that the photocurrent intensity in a Metal-Semiconductor-Metal (MSM) structure has a strong dependence on the position of the incident laser beam; however, there is no satisfactory explanation of this phenomenon. We simulated this process with device simulator ATLAS, and the result agrees with experiment pretty well. We also investigated various factors such as material property and external bias voltage that affect the current density, and found that the photocurrent changed significantly with these parameters.
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