{"title":"MEMS陀螺电极结构优化及电压形成规律","authors":"S. Pavlova, Y. Nekrasov","doi":"10.23919/ICINS.2019.8769435","DOIUrl":null,"url":null,"abstract":"This report analyzes foreign and domestic methods for improving robustness (accuracy in harsh environment) of MEMS gyros and considers improvement of the MEMS gyro developed by the CSRI Elektropribor owing to optimization of the gyro electrode structure and laws of voltage distribution. Gyro sensitivity to harsh environment conditions is discussed. The authors propose the criteria for changing the existing electrode structure and substantiate its choice and the electrode dimensions.","PeriodicalId":108493,"journal":{"name":"2019 26th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optimization of MEMS Gyro Electrode Configuration and Laws of Voltage Formation\",\"authors\":\"S. Pavlova, Y. Nekrasov\",\"doi\":\"10.23919/ICINS.2019.8769435\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This report analyzes foreign and domestic methods for improving robustness (accuracy in harsh environment) of MEMS gyros and considers improvement of the MEMS gyro developed by the CSRI Elektropribor owing to optimization of the gyro electrode structure and laws of voltage distribution. Gyro sensitivity to harsh environment conditions is discussed. The authors propose the criteria for changing the existing electrode structure and substantiate its choice and the electrode dimensions.\",\"PeriodicalId\":108493,\"journal\":{\"name\":\"2019 26th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 26th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/ICINS.2019.8769435\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 26th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/ICINS.2019.8769435","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optimization of MEMS Gyro Electrode Configuration and Laws of Voltage Formation
This report analyzes foreign and domestic methods for improving robustness (accuracy in harsh environment) of MEMS gyros and considers improvement of the MEMS gyro developed by the CSRI Elektropribor owing to optimization of the gyro electrode structure and laws of voltage distribution. Gyro sensitivity to harsh environment conditions is discussed. The authors propose the criteria for changing the existing electrode structure and substantiate its choice and the electrode dimensions.
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