{"title":"用于测量表面轮廓的动态聚焦光电传感器系统","authors":"R. Gu, C. Xu, L. Lio, G. Shen","doi":"10.1117/12.150666","DOIUrl":null,"url":null,"abstract":"A test unit is described which includes an automatic focusing device and a displacement sensor for lens movement. The resolution of the unit is 20 nm in the range of +/- 40 micrometers . In addition, a technique for ensuring the focal spot using the character of the laser diode is presented. This measurement principle can be widely used in the areas of precision manufacture, optical industry, and soft materials testing.","PeriodicalId":212484,"journal":{"name":"Optical Storage and Information Data Storage","volume":"62 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-08-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Dynamical focusing electro-optical sensor system for measuring surface contours\",\"authors\":\"R. Gu, C. Xu, L. Lio, G. Shen\",\"doi\":\"10.1117/12.150666\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A test unit is described which includes an automatic focusing device and a displacement sensor for lens movement. The resolution of the unit is 20 nm in the range of +/- 40 micrometers . In addition, a technique for ensuring the focal spot using the character of the laser diode is presented. This measurement principle can be widely used in the areas of precision manufacture, optical industry, and soft materials testing.\",\"PeriodicalId\":212484,\"journal\":{\"name\":\"Optical Storage and Information Data Storage\",\"volume\":\"62 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-08-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Storage and Information Data Storage\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.150666\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Storage and Information Data Storage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.150666","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Dynamical focusing electro-optical sensor system for measuring surface contours
A test unit is described which includes an automatic focusing device and a displacement sensor for lens movement. The resolution of the unit is 20 nm in the range of +/- 40 micrometers . In addition, a technique for ensuring the focal spot using the character of the laser diode is presented. This measurement principle can be widely used in the areas of precision manufacture, optical industry, and soft materials testing.
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