{"title":"快速现场解决方案的热和静电分析","authors":"V. Székely, M. Rencz","doi":"10.1109/DATE.1998.655907","DOIUrl":null,"url":null,"abstract":"Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The /spl mu/S-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool.","PeriodicalId":179207,"journal":{"name":"Proceedings Design, Automation and Test in Europe","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"21","resultStr":"{\"title\":\"Fast field solvers for thermal and electrostatic analysis\",\"authors\":\"V. Székely, M. Rencz\",\"doi\":\"10.1109/DATE.1998.655907\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The /spl mu/S-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool.\",\"PeriodicalId\":179207,\"journal\":{\"name\":\"Proceedings Design, Automation and Test in Europe\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-02-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"21\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings Design, Automation and Test in Europe\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DATE.1998.655907\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Design, Automation and Test in Europe","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DATE.1998.655907","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fast field solvers for thermal and electrostatic analysis
Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The /spl mu/S-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool.
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