F. Carstens, H. Ehlers, S. Schlichting, L. Jensen, D. Ristau
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High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters
To increase the accuracy of layer thicknesses in the production of miniaturized thin-film filters controlled by optical broadband monitoring, a high-resolution monitoring system was developed and evaluated by coating simulations and experiments.
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