多功能,高精度扫描镜头试验台

Wayne M. Richard, Glenn Parker
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摘要

扫描透镜测试台必须适应广泛的尺寸,格式和波长的扫描透镜制造今天。此外,它的计量必须能够准确测量角度和距离,以验证扫描线性度。所有这些都是在设计和制造这个长凳时仔细考虑的。条纹计数干涉法用于监测直线运动和角运动。通过切臂连接到边缘计数器上,在测试透镜的入口瞳孔位置旋转的平镜用于在几秒钟的弧内准确地将输入光束偏转到所需的扫描角度。由于光束偏转是由旋转镜产生的,因此激光器和光束扩展器的光学元件是固定的。因此,几乎任何激光和光束扩展器都可以适应这种设置。这简化了所需波长和输入光束大小的选择。适配板便于安装有各种尺寸的镜头。长精度线性滑动运动用于适应较大格式的镜头。将讨论该试验台的设计、制造、校准和使用。
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Versatile, High Accuracy Scan Lens Test Bench
A scan lens test bench must be adaptable to the wide range of sizes, formats, and wavelengths of scan lenses manufactured today. In addition, it's metrology must be capable of accurately measuring angles and distances for verification of scan linearity. All of the above were carefully considered in the design and fabrication of this bench. Fringe counting interferometry is employed for monitoring linear and angular motions. Attached to a fringe counter via a tangent arm, a flat mirror, pivoting at the test lens' entrance pupil location, is used to accurately deflect the input beam to the desired scan angles within a few seconds of arc. Since the beam deflection is produced with the pivoting mirror, the laser and beam expander optics are stationary. Therefore, virtually any laser and beam expander can be adapted to the setup. This simplifies the selection of desired wavelengths and input beam sizes. Adapter plates facilitate mounting of lenses having a wide range of sizes. Long precision linear slide motions are used to accommodate larger format lenses. The design, fabrication, alignment, and use of this test bench will be discussed.
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