栅极长度为32–16nm时NMOS和PMOS等效输入电路的偏置依赖性

A. Bayoumi, Y. Hanafy
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摘要

随着CMOS从32纳米技术发展到16纳米技术,一些技术变化表明我们可以更有效地使用线性RC近似来模拟NMOS和PMOS的输入级。这改善了模拟电路输入级的非线性,如射频放大器和具有输入信号电压水平的缓冲器,从而允许更好的匹配网络。当使用快速香料对混合信号rfic的数字部分进行建模时,这种线性化也是至关重要的。对于32 - 16nm的物理栅极长度,较小的栅极面积导致源极/漏极重叠电容的作用更加明显(与电压无关)。金属栅极取代了多晶硅,消除了多晶硅的损耗。这使得有效栅极电容在反转时对电压的依赖更小。金属栅极具有低电阻率,这使得非准静态特性更容易建模,并且由于减少了分布栅极电阻效应,使得非准静态特性沿沟道宽度更均匀。最后,使用高介电常数(高k)的介电材料来代替薄的栅极氧化物导致栅极泄漏直接隧道电流的急剧减少,该电流被建模为与外加栅极电压呈指数依赖关系的并联电导。本文利用最近报道的技术设备特征来更新BSIM4预测技术模型(PTM)。利用SPICE电路模拟器模拟了32 ~ 16nm栅极长度下NMOS和PMOS输入等效电路对外加偏置的依赖关系。
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Bias dependence of NMOS and PMOS equivalent input circuits for 32–16nm gate length
As CMOS evolves from 32nm down to 16nm technologies, several technological changes suggest we can more efficiently use linear RC approximations to model the input stages of NMOS & PMOS. This improves the non-linearity of input stages of analog circuits such as RF amplifiers and buffers with input signal voltage levels, thus allowing better matching networks. This linearization is also critical when using fast spice in modeling the digital parts of a mixed signal RFICs. For physical gate lengths of 32 – 16nm, smaller gate area results in more pronounced role for overlap capacitance over source/drain (which is independent of voltage). Metal gates have replaced polysilicon, eliminating polysilicon depletion. This makes effective gate capacitance less voltage dependent in inversion. Metal gates have low resistivity, which makes non-quasi static characteristics easier to model and more uniform along the channel width, because of the reduction of the distributed gate resistance effect. Finally, using high dielectric constant (high-k) dielectrics to replace the thin gate oxides resulted in drastic reduction in gate leakage direct tunneling current, which is modeled as parallel conductance with an exponential dependence on applied gate voltage. In this paper, recently reported technology device features are used to update BSIM4 predictive technology models (PTM). The dependence of the NMOS & PMOS input equivalent circuits on applied biasing for 32–16nm gate lengths is simulated using SPICE circuit simulator.
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