{"title":"激光干涉仪非线性补偿的自适应TLS方法","authors":"Sangchul Lee, G. Heo, K. You","doi":"10.1109/FGCNS.2008.127","DOIUrl":null,"url":null,"abstract":"The heterodyne laser interferometer has been widely used in linear displacement and precise measurement field. However the periodic nonlinearity that arises from incomplete laser sources and nonideal optical components restricts the precise measurement at the nano-meter level. In this paper, the total least squares (TLS) algorithm which can obtain optimal compensation parameters of nonlinearity is introduced. Using the TLS algorithm, the nonlinearity error is reduced and the measurement data can be more stabilized. The effectiveness of TLS approach is verified through the comparison of the experimental results with those obtained by a capacitance displacement sensor.","PeriodicalId":370780,"journal":{"name":"2008 Second International Conference on Future Generation Communication and Networking Symposia","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Adaptive TLS Approach for Nonlinearity Compensation in Laser Interferometer\",\"authors\":\"Sangchul Lee, G. Heo, K. You\",\"doi\":\"10.1109/FGCNS.2008.127\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The heterodyne laser interferometer has been widely used in linear displacement and precise measurement field. However the periodic nonlinearity that arises from incomplete laser sources and nonideal optical components restricts the precise measurement at the nano-meter level. In this paper, the total least squares (TLS) algorithm which can obtain optimal compensation parameters of nonlinearity is introduced. Using the TLS algorithm, the nonlinearity error is reduced and the measurement data can be more stabilized. The effectiveness of TLS approach is verified through the comparison of the experimental results with those obtained by a capacitance displacement sensor.\",\"PeriodicalId\":370780,\"journal\":{\"name\":\"2008 Second International Conference on Future Generation Communication and Networking Symposia\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 Second International Conference on Future Generation Communication and Networking Symposia\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FGCNS.2008.127\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 Second International Conference on Future Generation Communication and Networking Symposia","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FGCNS.2008.127","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Adaptive TLS Approach for Nonlinearity Compensation in Laser Interferometer
The heterodyne laser interferometer has been widely used in linear displacement and precise measurement field. However the periodic nonlinearity that arises from incomplete laser sources and nonideal optical components restricts the precise measurement at the nano-meter level. In this paper, the total least squares (TLS) algorithm which can obtain optimal compensation parameters of nonlinearity is introduced. Using the TLS algorithm, the nonlinearity error is reduced and the measurement data can be more stabilized. The effectiveness of TLS approach is verified through the comparison of the experimental results with those obtained by a capacitance displacement sensor.
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