用细观模型方法分析AFM法测量涂层表面粗糙度与分形维数的关系

A. González-Hernández, E. Suárez-Domínguez, E. Izquierdo-Kulich, A. Morales‐Cepeda
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摘要

表面涂层是一种用于防止金属腐蚀和环境影响的方法。在固体表面的情况下,涂层可以通过射频磁控溅射或其他耐腐蚀物质来实现,这可能涉及到一层或多层的沉积,取决于所涉及的程序,改变表面和表面积的形态。本工作旨在通过测量表面涂层的粗糙度和分形维数来研究两种表面形态学方法的关系,双层Ti/WTiN/WTiC(命名为n = 1);采用射频磁控溅射沉积多层[Ti/WTiN/WTiC] (n = 40)。通过轮廓仪和图像处理得到像素强度的测量结果。每个涂层的形貌都表现出带有杂质的织构,呈小簇状岛状分布。表面粗糙度分别为9.42和18.63 nm;分形维数分别为2.55和2.32,粗糙度与分形维数相关性较低。r平方分析显示分形维数值之间关系良好,趋于负线性回归。因子设计22的结果证实了性能相关和线性回归分析。光学方法的分形维数测量在评价表面粗糙度方面具有很大的潜力,可以在实验室甚至大规模工业应用中得到补充。因此,统计处理的结果在测量中显示出较高的准确性。
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Relationship analysis of surface roughness measurements on coatings using AFM and fractal dimension by mesoscopic model methods
Surface coating is a method used for protection against corrosion and environmental impact for metals. In the case of solid surfaces, coatings can be achieved by radio-frequency magnetron sputtering or other corrosion-resistant substances, which may involve the deposition of one or more layers, depending on the procedure involved, modifying the morphology of the surface and surface area. This work aims to study the relationship of two surface morphological methods through roughness and fractal dimension measurements in top-surface coatings, bilayer Ti/WTiN/WTiC (named as n = 1); multilayer [Ti/WTiN/WTiC] (named as n = 40) deposited by RF-magnetron sputtering. The measurements were obtained by profilometer and image processing pixel intensity. The topography of each coating exhibited texture with impurities as domes distributed in small cluster island types. The surface roughness were 9.42 and 18.63 nm; fractal dimension measurements were 2.55 and 2.32, respectively, with a low correlation between roughness and fractal dimension. The R-squared analysis exhibited a good relationship between the fractal dimension values, tending linear regression negative. The result of factorial design 22 confirmed the performance correlation and linear regression analyses. The fractal dimension measurements by the optical method can be great potential to evaluate surface roughness complementary in applications such as laboratories and even in scale industrial. Thus the result of statistical treatment shows high accuracy in the measurements.
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