{"title":"磁控溅射沉积纯硼涂层及其性能研究","authors":"Alexey Nikolaev, Alexey Bugaev, Valeria Frolova, Vasily Gushenets, Efim Oks, Alexey Vizir","doi":"10.1615/hightempmatproc.2023050374","DOIUrl":null,"url":null,"abstract":"We have deposited pure boron coatings on stainless-steel substrates using a planar magnetron with thermally insulated target of pure crystalline boron in a direct current discharge of up to 50 mA in an argon atmosphere. The magnetron was designed to be used as a component in an electron-ion-plasma test bench for in situ monitoring of boron deposition growth using synchrotron radiation from the VEPP-3 electron storage ring at the Budker Institute of Nuclear Physics of the Siberian Branch of the Russian Academy of Sciences. Using this magnetron, we have fabricated boron films with thickness up to 1.5 µm and studied their surface morphology, mechanical properties, and coating composition.","PeriodicalId":50406,"journal":{"name":"High Temperature Material Processes","volume":null,"pages":null},"PeriodicalIF":0.7000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Deposition of pure boron coatings by magnetron sputtering and investigation of their properties\",\"authors\":\"Alexey Nikolaev, Alexey Bugaev, Valeria Frolova, Vasily Gushenets, Efim Oks, Alexey Vizir\",\"doi\":\"10.1615/hightempmatproc.2023050374\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have deposited pure boron coatings on stainless-steel substrates using a planar magnetron with thermally insulated target of pure crystalline boron in a direct current discharge of up to 50 mA in an argon atmosphere. The magnetron was designed to be used as a component in an electron-ion-plasma test bench for in situ monitoring of boron deposition growth using synchrotron radiation from the VEPP-3 electron storage ring at the Budker Institute of Nuclear Physics of the Siberian Branch of the Russian Academy of Sciences. Using this magnetron, we have fabricated boron films with thickness up to 1.5 µm and studied their surface morphology, mechanical properties, and coating composition.\",\"PeriodicalId\":50406,\"journal\":{\"name\":\"High Temperature Material Processes\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.7000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"High Temperature Material Processes\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1615/hightempmatproc.2023050374\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"High Temperature Material Processes","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1615/hightempmatproc.2023050374","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Deposition of pure boron coatings by magnetron sputtering and investigation of their properties
We have deposited pure boron coatings on stainless-steel substrates using a planar magnetron with thermally insulated target of pure crystalline boron in a direct current discharge of up to 50 mA in an argon atmosphere. The magnetron was designed to be used as a component in an electron-ion-plasma test bench for in situ monitoring of boron deposition growth using synchrotron radiation from the VEPP-3 electron storage ring at the Budker Institute of Nuclear Physics of the Siberian Branch of the Russian Academy of Sciences. Using this magnetron, we have fabricated boron films with thickness up to 1.5 µm and studied their surface morphology, mechanical properties, and coating composition.
期刊介绍：
High Temperature Material Processes is an important international publication devoted to original and invited review papers on fundamental and applied re-search and new developments in materials processing and synthesis at high temperatures, especially under the plasma action as well as the treatment by laser, ion and electron beams. Processes of interest include (but not limited to) surface treatments, alloying, coatings production, nanostructures synthesis, welding, cutting, melting, re-melting and purification of metals, metallurgy (among them plasma metallurgy), powder densification, ultra-fine powder production, waste conversion and destruction. In addition, attention is paid to the development, description and study of experimental and industrial systems and devices for the implementation of high-technology plasma and beam processes. Thus, there is a broad range of coverage of experimental, analytical and numerical studies. High Temperature Material Processes will serve the needs of those who develop high temperature processes to produce materials with improved properties, surface treatments or coatings with given specifications, and will also promote connections between laboratories and industry.
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