A phase error compensation method for three-dimensional shape measurement using improved iteration algorithm

AbstractThe binary defocusing has been extensively studied in the three-dimensional measurement. But if the projector is slightly defocused, the binary fringes after defocusing still contain high-order harmonics compared with the ideal sinusoidal fringes, so the phase error caused by the nonlinear response is not negligible. In this paper, two models are proposed to calculate and compensate phase error, which include a double-precision iterative compensation model (DPICM) and a dual-domain iterative compensation model (DDICM). These two models obtain accurate phase errors by fusing the phases at different precision and domains. DPICM is composed of the double precision method and the improved iterative algorithm, and DDICM consists of the dual-domain method and the improved iterative algorithm. This improved iterative algorithm is used to compensate phase error, which can improve phase accuracy. DPICM and DDICM reduce the RMS error by 25.5% and 13.5% respectively.KEYWORDS: Three-dimensional shape measurementphase error compensationiteration algorithmphase shifting profilometry Disclosure statementNo potential conflict of interest was reported by the author(s).Additional informationFundingThis work is supported by International Cooperation Foundation of 10.13039/501100003807 Jilin Province (Grant Nos. 20210402074GH) and the 111 Project of China (Grant Nos. D21009 and D17017).