Time-reduction imaging method for scanning-probe microscopy using a compressed sensing algorithm based on sequential reconstruction method

The surface image measurement time was reduced by data completion using a compressed sensing algorithm in the image-acquisition of scanning probe microscopy. In particular, by reducing the number of acquisition points of the surface-roughness image and reconstructing the image using estimated values, acquiring the surface image at one-eighth of the data-measurement time became possible. The reduced measurement time was shown to reduce the influence of thermal drift during image capture. The real time surface image demonstrated that reconstruction is possible during surface image acquisition.