基于机器学习的反应离子蚀刻二硫化钼原子层控制预测

IF 1.2 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Applied Science and Convergence Technology Pub Date : 2023-08-11 DOI:10.5757/asct.2023.32.5.106
Changmin Kim, Seunghwan Lee, Muyoung Kim, Min Sup Choi, Taesung Kim, Hyeong-U Kim
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Machine Learning-Based Prediction of Atomic Layer Control for MoS2 via Reactive Ion Etcher
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来源期刊
CiteScore
1.40
自引率
12.50%
发文量
27
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