基于改进互相关法的AlN压电微机械超声换能器阵列双通道超声流量计

IF 2.4 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micromechanics and Microengineering Pub Date : 2023-10-20 DOI:10.1088/1361-6439/ad0307

Linjin Shi, Mengjiao Qu, Dongze Lv, Weiting Liu, Jin Xie

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引用次数: 0

摘要

提出了一种基于AlN压电微机械超声换能器(PMUTs)的高精度双通道超声流量计，用于测量小直径(9.6 mm)管道的流量。超声波换能器由四个10 × 10的pmut阵列组成，在空气中谐振频率为1mhz。超声波换能器在连续正弦电压的激励下，对收发信号进行互相关运算，得到超声波在液体中的时间延迟。流量计采用双通道设计，通过取平均值来减小测量误差。为了减小互相关运算中的误差，提出了一种迭代算法，有效地提高了测量精度。流量计在3.5-10 l min−1的流量范围内进行评估，相对误差较小，为0.7%。

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A Two-channel Ultrasonic Flowmeter Based on AlN Piezoelectric Micromachined Ultrasonic Transducers Arrays with Improved Cross-correlation Method

Abstract This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small-diameter pipes (9.6 mm). The ultrasonic transducers consist of four 10 by 10 PMUTs arrays with resonant frequency of 1 MHz in air. The ultrasonic transducers are excited by continuous sine voltage, and the transmitted and received signals are subjected to cross-correlation operation to obtain the time delay of the ultrasonic wave in the liquid. A dual-channel design of the flowmeter can reduce measurement errors by taking the average value. To reduce errors in the cross-correlation operation, an iterative algorithm is proposed, which effectively improves the measurement accuracy. The flowmeter is evaluated in flow range of 3.5–10 l min −1 , and has a small relative error of 0.7%.

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来源期刊

Journal of Micromechanics and Microengineering 工程技术-材料科学：综合

CiteScore

4.50

自引率

4.30%

发文量

136

审稿时长

2.8 months

期刊介绍： Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.