{"title":"冷却速率对凝固过程中GaAs组织和缺陷演变的影响","authors":"Siyuan Wang, Qian Chen, Yongkai Yuan, Tinghong Gao, Yongchao Liang, Zean Tian, Anqi Yang","doi":"10.1088/1361-651x/ad041b","DOIUrl":null,"url":null,"abstract":"Abstract The fabrication of high-quality GaAs crystals is essential to approach optimal performance in optoelectronic and microelectronic devices. In this study, a molecular dynamics simulation study was conducted for the solidification of liquid GaAs at three cooling rates (10 10 K s −1 , 10 11 K s −1 , and 10 12 K s −1 ) at 300 K. The structural evolution in terms of crystal structure and defect formation in GaAs was thoroughly investigated using pair distribution function, average atomic energy, the largest standard cluster analysis, and visualization techniques. The results showed that the cooling rate of 10 10 K s −1 led to the development of the best crystal quality with ease of eutectic twin grain boundary coherent twin boundary formation. Increasing the cooling rates to 10 11 K s −1 and 10 12 K s −1 resulted in the amorphous structure. Both high and low cooling rates profoundly affected the formation of As 8 structure, but a maximum amount of 2.2% of As 8 crystal structure was formed at a cooling rate of 10 11 K s −1 . The reduction in cooling rate to 10 10 K s −1 induced the formation of numerous Schottky and Frenkel types of partial dislocations in the GaAs system. Results of this study can serve as potential guidelines to the theory of crystal growth and may be implemented in the fabrication of high-quality GaAs crystals for optimal device performance.","PeriodicalId":18648,"journal":{"name":"Modelling and Simulation in Materials Science and Engineering","volume":"29 1","pages":"0"},"PeriodicalIF":1.9000,"publicationDate":"2023-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of cooling rate on microstructure and defect evolution in GaAs during solidification\",\"authors\":\"Siyuan Wang, Qian Chen, Yongkai Yuan, Tinghong Gao, Yongchao Liang, Zean Tian, Anqi Yang\",\"doi\":\"10.1088/1361-651x/ad041b\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract The fabrication of high-quality GaAs crystals is essential to approach optimal performance in optoelectronic and microelectronic devices. In this study, a molecular dynamics simulation study was conducted for the solidification of liquid GaAs at three cooling rates (10 10 K s −1 , 10 11 K s −1 , and 10 12 K s −1 ) at 300 K. The structural evolution in terms of crystal structure and defect formation in GaAs was thoroughly investigated using pair distribution function, average atomic energy, the largest standard cluster analysis, and visualization techniques. The results showed that the cooling rate of 10 10 K s −1 led to the development of the best crystal quality with ease of eutectic twin grain boundary coherent twin boundary formation. Increasing the cooling rates to 10 11 K s −1 and 10 12 K s −1 resulted in the amorphous structure. Both high and low cooling rates profoundly affected the formation of As 8 structure, but a maximum amount of 2.2% of As 8 crystal structure was formed at a cooling rate of 10 11 K s −1 . The reduction in cooling rate to 10 10 K s −1 induced the formation of numerous Schottky and Frenkel types of partial dislocations in the GaAs system. Results of this study can serve as potential guidelines to the theory of crystal growth and may be implemented in the fabrication of high-quality GaAs crystals for optimal device performance.\",\"PeriodicalId\":18648,\"journal\":{\"name\":\"Modelling and Simulation in Materials Science and Engineering\",\"volume\":\"29 1\",\"pages\":\"0\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2023-11-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Modelling and Simulation in Materials Science and Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-651x/ad041b\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Modelling and Simulation in Materials Science and Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1361-651x/ad041b","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
摘要
制备高质量的砷化镓晶体对于实现光电和微电子器件的最佳性能至关重要。在本研究中,对300 K下三种冷却速率(10 10 K s−1、10 11 K s−1和10 12 K s−1)下液态砷化镓的凝固进行了分子动力学模拟研究。利用对分布函数、平均原子能量、最大标准聚类分析和可视化技术深入研究了砷化镓晶体结构和缺陷形成方面的结构演变。结果表明,在10 ~ 10 K s−1的冷却速率下,晶体质量最好,易于形成共晶孪晶界。将冷却速率提高到10 11 K s−1和10 12 K s−1,形成非晶结构。高冷却速率和低冷却速率对As - 8结构的形成都有较大影响,但在冷却速率为10 11 K s−1时,As - 8晶体结构的形成量最大,为2.2%。当冷却速率降低到1010ks−1时,砷化镓体系中形成了许多Schottky和Frenkel类型的部分位错。本研究结果可作为晶体生长理论的潜在指导,并可用于制造高质量的GaAs晶体以获得最佳器件性能。
Influence of cooling rate on microstructure and defect evolution in GaAs during solidification
Abstract The fabrication of high-quality GaAs crystals is essential to approach optimal performance in optoelectronic and microelectronic devices. In this study, a molecular dynamics simulation study was conducted for the solidification of liquid GaAs at three cooling rates (10 10 K s −1 , 10 11 K s −1 , and 10 12 K s −1 ) at 300 K. The structural evolution in terms of crystal structure and defect formation in GaAs was thoroughly investigated using pair distribution function, average atomic energy, the largest standard cluster analysis, and visualization techniques. The results showed that the cooling rate of 10 10 K s −1 led to the development of the best crystal quality with ease of eutectic twin grain boundary coherent twin boundary formation. Increasing the cooling rates to 10 11 K s −1 and 10 12 K s −1 resulted in the amorphous structure. Both high and low cooling rates profoundly affected the formation of As 8 structure, but a maximum amount of 2.2% of As 8 crystal structure was formed at a cooling rate of 10 11 K s −1 . The reduction in cooling rate to 10 10 K s −1 induced the formation of numerous Schottky and Frenkel types of partial dislocations in the GaAs system. Results of this study can serve as potential guidelines to the theory of crystal growth and may be implemented in the fabrication of high-quality GaAs crystals for optimal device performance.
期刊介绍:
Serving the multidisciplinary materials community, the journal aims to publish new research work that advances the understanding and prediction of material behaviour at scales from atomistic to macroscopic through modelling and simulation.
Subject coverage:
Modelling and/or simulation across materials science that emphasizes fundamental materials issues advancing the understanding and prediction of material behaviour. Interdisciplinary research that tackles challenging and complex materials problems where the governing phenomena may span different scales of materials behaviour, with an emphasis on the development of quantitative approaches to explain and predict experimental observations. Material processing that advances the fundamental materials science and engineering underpinning the connection between processing and properties. Covering all classes of materials, and mechanical, microstructural, electronic, chemical, biological, and optical properties.