NIR-VIS光电探测器用多孔硅的制备与表征研究

IF 0.9 Q4 NANOSCIENCE & NANOTECHNOLOGY International Journal of Nanoscience Pub Date : 2023-10-18 DOI:10.1142/s0219581x23300067
Rusul Hamoud Abd Ali, Mushtak A. Jabbar, Ahmed N. Abd
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引用次数: 0

摘要

本文采用电化学刻蚀n型硅(n-Si)晶片的方法制备了电流密度为10 mA⋅cm的多孔硅(PSi)[公式:见文],并通过XRD、AFM、FTIR和PL分析了多孔硅(PSi)的结构和形态。主峰特性分配给平面(004)。原子力显微镜图像和n-PSi晶粒分布图显示,n-PSi晶粒尺寸为−8.98。FTIR是一种功能强大且易于使用的获取PSi表面化学状态的技术。这种便利性来自于硅对红外光的透明度和高表面积。基本特征从与氢[Si-H]和氧[Si-O]成键的知识开始。模型计算有时在分配中提供有用的信息。通过FTIR检测,活性键显示PSi的形成。在(600 ~ 900)nm范围内测得光谱,固定激发波长为500 nm的发射峰,光谱为1.78 eV和1.24 eV。由于其具有高表面体积比和高光吸收率等新特性,PSi被认为是光子器件的一个有吸引力的组成部分。我们首次报道了用PSi制备的近红外光谱和光激发层。
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Fabrication and Characterization study of Porous Silicon for NIR-VIS Photodetector Applications
In this paper, photoelectrochemical etching of the n-type silicon (n-Si) wafers is used to prepare porous silicon (PSi) with current density of 10 mA⋅cm[Formula: see text] for 10 min. Moreover, the structural and morphological properties of the n-PSi were analyzed by using XRD and AFM, FTIR and PL. XRD patterns of PSi show that the films are single-crystalline, with cubic structure. The major peak characteristics are allocated to plane (004). The atomic force microscope image and the distribution chart of the grains of the n-PSi displayed that the grain sizes were −8.98. FTIR is a powerful and easy-to-use technique to obtain the surface chemical state of PSi. The convenience results from the transparency of silicon for IR light and the high surface area. The basic features begin from the knowledge of the bondings to hydrogen, [Si–H], and to oxygen [Si–O]. The model calculations sometimes provide useful information in the assignment. By examining FTIR, the active bonds showed the formation of PSi. PL spectra were measured in the range of (600–900) nm, the emission peak for the fixed excitation wavelength at 500 nm, and spectral 1.78 eV and 1.24 eV. PSi is recognized as an attractive building block for photonic devices because of its novel properties including high ratio of surface to volume and high light absorption. We first report NIR and VIS (PDs) fabricated by PSi as a carrier collector and a photoexcitation layer.
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来源期刊
International Journal of Nanoscience
International Journal of Nanoscience NANOSCIENCE & NANOTECHNOLOGY-
CiteScore
1.60
自引率
12.50%
发文量
62
期刊介绍: This inter-disciplinary, internationally-reviewed research journal covers all aspects of nanometer scale science and technology. Articles in any contemporary topical areas are sought, from basic science of nanoscale physics and chemistry to applications in nanodevices, quantum engineering and quantum computing. IJN will include articles in the following research areas (and other related areas): · Properties Effected by Nanoscale Dimensions · Atomic Manipulation, Coupling of Properties at the Nanoscale · Controlled Synthesis, Fabrication and Processing at the Nanoscale · Nanoscale Precursors and Assembly, Nanostructure Arrays, Fullerenes, Carbon Nanotubes and Organic Nanostructures · Quantum Dots, Quantum Wires, Quantum Wells, Superlattices
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