{"title":"光刻和3D制造工艺:综述","authors":"Abhishek Kumar, Swapnendu Narayan Ghosh, Santanu Talukder, Deepak Chopra","doi":"10.30919/esmm974","DOIUrl":null,"url":null,"abstract":": The present review provides in-depth insights of the various lithographic processes that are currently being used in academic and industrial research labs for fabricating various micro-and nano-scale devices. All the patterning techniques discussed in this review have their own unique set of characteristics and use-case depending on the design requirement of the devices that need to be fabricated. This has tremendous implications in the electronic industry.","PeriodicalId":11851,"journal":{"name":"ES Materials & Manufacturing","volume":"121 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Lithography and 3D Fabrication Processes: A Review\",\"authors\":\"Abhishek Kumar, Swapnendu Narayan Ghosh, Santanu Talukder, Deepak Chopra\",\"doi\":\"10.30919/esmm974\",\"DOIUrl\":null,\"url\":null,\"abstract\":\": The present review provides in-depth insights of the various lithographic processes that are currently being used in academic and industrial research labs for fabricating various micro-and nano-scale devices. All the patterning techniques discussed in this review have their own unique set of characteristics and use-case depending on the design requirement of the devices that need to be fabricated. This has tremendous implications in the electronic industry.\",\"PeriodicalId\":11851,\"journal\":{\"name\":\"ES Materials & Manufacturing\",\"volume\":\"121 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ES Materials & Manufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.30919/esmm974\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ES Materials & Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.30919/esmm974","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Lithography and 3D Fabrication Processes: A Review
: The present review provides in-depth insights of the various lithographic processes that are currently being used in academic and industrial research labs for fabricating various micro-and nano-scale devices. All the patterning techniques discussed in this review have their own unique set of characteristics and use-case depending on the design requirement of the devices that need to be fabricated. This has tremendous implications in the electronic industry.
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