沉积时间和退火对化学沉积ZnS薄膜结构和光学性能影响的研究

IF 0.5 Q4 PHYSICS, MULTIDISCIPLINARY Jordan Journal of Physics Pub Date : 2023-08-31 DOI:10.47011/16.3.6
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引用次数: 0

摘要

摘要:采用化学浴沉积(CBD)技术成功制备了ZnS薄膜。利用x射线衍射仪(XRD)和紫外可见分光光度计分别研究了沉积时间和退火对薄膜结构和光学性能的影响。沉积30min的ZnS薄膜XRD谱图显示,在2θ值28.75、48.05、56.47处有3个峰,分别对应于(111)(主峰)、(220)、(311)反射面,为立方结构。与60 min制备的薄膜相比,后者的峰宽更窄,强度更强,更尖锐,并在2θ角为33.51°处产生另一个弱峰。退火处理后产生更强烈和更尖锐的峰,其宽度进一步缩小,从而改善了结晶度。从SEM显微照片中检测到的颗粒具有不同大小的明确的球形。退火后晶粒形状发生变化,主要是由于晶粒的聚并。EDX结果表明,制备的薄膜中存在Zn和S。结果表明,薄膜在可见光区的最大透过率为82.1%,退火后提高到89.2%。结果表明,沉积膜和退火膜的能带隙分别在3.58 ~ 3.75 eV和3.41 ~ 3.73 eV之间,表明能带隙随退火而减小。关键词:化学浴沉积,硫化锌,光学性能,退火,薄膜,沉积时间。
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Investigation of the Effect of Deposition Time and Annealing on the Structural and Optical Properties of Chemically Deposited ZnS Thin Films
Abstract: The Chemical bath deposition (CBD) technique was successfully used to deposit ZnS thin films. The effects of deposition time and annealing on the structural and optical properties of the obtained thin films were investigated by X-ray diffraction (XRD), and UV-Vis spectrophotometer, respectively. The XRD pattern for the as-deposited ZnS thin films deposited for 30 min showed three peaks at 2θ values of 28.75o, 48.05o, and 56.47o corresponding to (111) (main peak), (220), and (311) reflection planes, indicating cubic structure. Comparing these peaks with that of the films prepared for 60 min, the latter have narrower widths, are more intense, sharper, and produce another weak peak at 2θ angle of 33.51o. Post-annealing treatment results in even more intense and sharper peaks, with their width narrowing further, causing an improvement in the crystallinity. The grains detected from the SEM micrograph are well-defined with spherical shapes of varying sizes. The grain shape changes after annealing due to coalescence of the grains. According to the EDX result, Zn and S were present in the prepared film. The as-deposited films showed a maximum transmittance of 82.1% at the visible region, which increased to 89.2% after annealing. The optical energy band gap was found to be in the ranges of 3.58 - 3.75 eV and 3.41 - 3.73 eV for the as-deposited and annealed films, respectively, signifying that the energy band gap decreases with annealing. Keywords: Chemical bath deposition, Zinc sulphide, Optical properties, Annealing, Thin films, Deposition time.
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来源期刊
Jordan Journal of Physics
Jordan Journal of Physics PHYSICS, MULTIDISCIPLINARY-
CiteScore
0.90
自引率
14.30%
发文量
38
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