电化学金属化电阻存储器导电丝生长过程中离子动力学研究

None Qing Ke, None Yuehua Dai
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引用次数: 0

摘要

利用Arrhenius定律和离子运动的过电位理论,建立了双极ECM电阻器件中修正的Mott-Gurney微分方程组。离子的平均位移用修正的Mott-Gurney方程求解。然后,通过基于单元的几何模型得到了平均位移与导电丝生长长度之间的关系。利用这一关系式推导出了施加电压与成形/凝固时间的关系式和导电丝生长长度与时间的关系式。本文还提出了一种提取双极ECM器件中离子动力学参数的算法。利用该算法计算了Ag/γ-AgI/Pt、Ag/TiO<sub>2</sub>/Pt、Ag/GeS<sub>2</sub>/W和Cu/SiO<sub>2</sub>/Au器件的施加电压随成形时间的变化特性,计算结果与实验数据一致。我们发现,在形成/凝固过程中,银离子的跳跃步长是TiO<sub>2</sub>跳跃阶跃等于γ-AgI的立方晶格常数a。这些结果解释如下。在这两种晶体的单晶胞中,有一些四面体和八面体的间隙位。阳离子运动路径由八面体和四面体位点交替或部分八面体位点组成。阳离子在共面多面体γ-AgI中从四面体跳到八面体再跳到四面体等,在TiO<sub>2</sub>边缘共享的八面体。在GeS< sub> 2 & lt; / sub>晶体中,我们发现银离子的跳跃步长是单位胞c方向的晶格常数。由于晶格的周期性,离子在三种材料中的运动路径可以用周期性势垒来表示。对铜离子在非晶SiO<sub>2</sub>中的跃迁情况进行了计算,铜离子的跃迁步长为O-O键长度的1.57倍,其跃迁途径也可以用周期势垒来解释。通过引入余弦势垒,得到离子活化频率、势垒高度、离子迁移率和电位;计算了几种器件中导电丝生长随时间的扩散系数和特性。利用这些数据,讨论了双极ECM器件介质材料的选择标准。发现双极ECM器件选择介电材料的标准是离子活化能≤0.5eV,最好在0.1-0.2eV之间,直流电导率尽可能接近10<sup> -4</sup>(Ω厘米)& lt; sup> 1 & lt; / sup>。
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Study on the kinetics of ions in the process of the conductive filament growth for the electrochemical metallization resistive memory
In this paper, a modified Mott-Gurney differential equation set was built by Arrhenius' law and the overpotential theory of ionic motion in bipolar ECM resistive devices. The average displacement of ions was solved by the modified Mott-Gurney equation. Then, the relation between the average displacement and the growth length of the conductive filament was obtained by a geometric model based on cells. The applied voltage versus Forming/Set time equation and the length of the conductive filament growth versus time equation have been deduced by using this relation. This article proposed also an algorithm for extracting kinetic parameters of ions in bipolar ECM devices. By using this algorithm, the characteristics of the applied voltage versus Forming/Set time for Ag/γ-AgI/Pt, Ag/TiO2/Pt, Ag/GeS2/W, and Cu/SiO2/Au devices were calculated and the calculative results were consistent with experimental data. We found that in the Forming/Set process, the jump step of silver ions is the lattice constant along c direction of a unit cell of the crystal for TiO2 and the jump step is equal to the lattice constant of the cubic, a, for γ-AgI. These results are explained as followings. In a unit cell of the two crystals there are some tetrahedral and octahedral interstitial sites. The cationic motion paths consist of alternating octahedral and tetrahedral sites or some octahedral sites. The cations jump from tetrahedron to octahedron to tetrahedron etc. in the γ-AgI with coplanar polyhedron and octahedron to octahedron in the TiO2 with edge shared octahedron. In GeS2 crystal, we have found that the jump step of silver ions was the lattice constant in the c direction of a unit cell. Due to the periodicity of the lattice, the pathway of the ion motion in the three materials can be expressed by a periodic potential barrier. There had been calculated for the jump situation of the copper ion in amorphous SiO2, the jump step of copper ions was 1.57 times of the length of the O-O bond, and the jump pathway could be also explained by a periodic potential barrier. By introducing the cosine potential barrier, the ionic activation frequency, potential barrier height, ionic mobility & diffusion coefficient, and characteristics of the conductive filament growth versus time in several devices were calculated. The criteria of selecting dielectric materials for bipolar ECM devices was discussed by using these data. It was found that the standard for selecting dielectric materials of bipolar ECM devices is the ion activation energy ≤ 0.5eV, preferably between 0.1-0.2eV, and the DC conductivity as close as possible to 10‒4 (Ω cm)‒1.
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