激光诱导放电等离子体及其极紫外辐射的模拟

None Wang Jun-Wu, None Xuan Hong-Wen, None Yu Hang-Hang, None Wang Xin-Bing, None Vassily S. Zakharov
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引用次数: 0

摘要

激光诱导放电等离子体是极紫外光源的重要技术手段之一。本文提出了一种基于全局状态方程模型、原子结构计算模型和碰撞辐射模型的辐射磁流体动力学模型,用于模拟激光诱导放电等离子体的动态特性及其极紫外辐射特性。模拟再现了放电过程中的夹点现象,得到的极紫外光转换效率与实验结果一致。
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Simulation of laser induced discharge plasma and its extreme ultraviolet radiation
Laser induced discharge plasma is one of the important technical means for extreme ultraviolet light source. In this paper, a radiation magneto-hydrodynamic model based on a global equation of state model, an atomic structure calculation model and a collision radiation model is proposed to simulate the dynamic characteristics of laser induced discharge plasma and its extreme ultraviolet radiation characteristics. The simulation reproduced the pinch phenomenon during the discharge process, and the conversion efficiency of extreme ultraviolet light obtained was consistent with the experiment result.
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