范德华异质结构的全干翻转传递方法

Kim, Dohun, Kim, Soyun, Cho, Yanni, Lee, Jaesung, Watanabe, Kenji, Taniguchi, Takashi, Jung, Minkyung, Falson, Joseph, Kim, Youngwook
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摘要

我们提出了一种新的范德华异质结构的翻转转移方法,通过消除对聚合物和溶剂的需要,比以前的技术提供了重大的进步。相反,我们利用市售的凝胶膜,并通过氧等离子体和uv -臭氧处理控制其粘性,也有效地去除凝胶膜表面的残留物。表面的清洁度是通过原子力显微镜来验证的。我们通过对石墨烯/hBN和石墨烯/{\ α}-RuCl3异质结构的磁输运测量来研究我们制造的器件的质量。值得注意的是,用翻转方法生产的石墨烯/hBN器件的显示质量与完全封装的器件相似。另外,霍夫施塔特蝴蝶的特征也在第二个装置中被观察到。在石墨烯/{\alpha}-RuCl3的情况下,我们观察到具有跳动模式和双通道传导的量子振荡,与完全封装的器件一致。
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Full-dry Flipping Transfer Method for van der Waals Heterostructure
We present a novel flipping transfer method for van der Waals heterostructures, offering a significant advancement over previous techniques by eliminating the need for polymers and solvents. Instead, we utilize commercially available gel film and control its stickiness through oxygen plasma and UV-Ozone treatment, also effectively removing residues from the gel film surface. The cleanliness of the surface is verified through atomic force microscopy. We investigate the quality of our fabricated devices using magnetotransport measurements on graphene/hBN and graphene/{\alpha}-RuCl3 heterostructures. Remarkably,graphene/hBN devices produced with the flipping method display quality similar to that of fully encapsulated devices. This is evidenced by the presence of a symmetry-broken state at 1 T. Additionally, features of the Hofstadter butterfly were also observed in the second devices. In the case of graphene/{\alpha}-RuCl3, we observe quantum oscillations with a beating mode and two-channel conduction, consistent with fully encapsulated devices.
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