利用Sentaurus TCAD设计隧道场效应管和FinFET并找出它们的特性

Debashish Dash, Shaik Abdul Rahiman, C. Pavitra Chowdary, Sagar Deo Singh
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引用次数: 0

摘要

本文采用Sentaurus TCAD设计并实现了一个FinFET和一个隧道场效应管(TFET)。由于FET和FinFET具有许多优点,因此已被提出作为传统金属氧化物半导体FET (MOSFET)的可能替代品。使用高达7纳米特征尺寸的FinFET技术实现了惊人的性能。对FinFET和TFET的短通道效应、量子隧道效应等各种效应以及电场、电压和电流、导通电流、掺杂浓度、能带图等特性进行了详细的观察。FinFET技术可用于设计各种低功耗CMOS数字电路和基于存储器的电路。相反,基于TFET的合成电路以其高灵敏度而闻名,因此它们适用于传感应用,特别是生物传感器。
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Designing of Tunnel FET and FinFET using Sentaurus TCAD and Finding their Characteristics
In this paper, a FinFET and Tunnel FET (TFET) are designed and implemented using Sentaurus TCAD. Due to numerous advantages, the TFET and FinFET have been proposed as a possible alternative to the conventional metal oxide semiconductor FET (MOSFET). A phenomenal performance-has been achieved using FinFET technology up to a 7 nm feature size. A detailed observation is made on FinFET and TFET regarding various effects such as short channel effects, quantum tunneling effect and characteristics like electric field, voltage and current, on-current, doping concentrations, energy band diagrams etc. FinFET technology can be used for designing different low power CMOS digital circuits and memory-based circuits. On the contrary, TFET based synthesized circuits are known for their high sensitivity, for which they are suitable for sensing applications, especially biosensors.
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