柔性生物电子学应用微结构图优化

Ishi Gupta, Manika Choudhury, G. Harish Gnanasambanthan, Debashis Maji
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引用次数: 1

摘要

柔性电子产品和可穿戴传感器的最新进展使生物医学技术具有了新的优势,克服了传统刚性硅基电子产品的局限性。此外,这些可穿戴传感器的高灵活性使其能够在任何不平整的表面上进行保形检测,有助于准确确定与表面相关的任何物理、化学或生理参数。传统昂贵的微/纳米光刻技术在严格的洁净室条件下被用于开发这些具有高精度和灵敏度的柔性和可穿戴生物医学传感器。然而,所开发的可穿戴传感器不仅需要极高的灵敏度,而且要具有成本效益才能成功使用。为了解决这个问题,本研究讨论了在柔性铜包覆表面上实现微图案的光图案化UV片的使用,从而消除了对昂贵的洁净室设施的需要。它演示了各种设计几何形状的标准化,使用类似于光刻工艺的柔性表面上的可光图案化UV片,并涉及优化UV片的曝光时间及其在不同厚膜金属表面上针对各种设计图案的开发时间。最后,利用上述工艺成功实现了微电极等图像化微器件,验证了其有效性。
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Optimization of Microstructure Patterning for Flexible Bioelectronics Application
Recent advancements in flexible electronics and wearable sensors have given biomedical technology a new edge overcoming the limitations of traditional rigid silicon-based electronics. Furthermore, high flexibility of these wearable sensors enables it to conformally sit over any uneven surface helping in accurate determination of any physical, chemical, or physiological parameter associate with the surface. Conventionally expensive micro/nano photolithography techniques under strict clean room conditions are used for the development of these flexible and wearable biomedical sensors with high degree of accuracy and sensitivity. However, the developed wearable sensors need not only be extremely sensitive, but also cost effective for its successful usage. To address this, the present work discusses the use of a photo-patternable UV sheet for realization of micro patterns over flexible copper cladded surface eliminating the need of costly clean room facilities. It demonstrates the standardization of various design geometries using the photo-patternable UV sheet over the flexible surface similar to photolithography process and involves optimization of the exposure timing of the UV sheets and their development time towards various design patterns over different thick film metal surfaces. Finally, patterned micro devices like micro-electrodes were successfully realized using the above process to ascertain its efficacy.
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