{"title":"以厚度扩展模式工作的AlN薄膜体声谐振器的新型模态耦合振动","authors":"Zinan Zhao, Nian Li, Yilin Qu, Weiqiu Chen","doi":"10.1007/s10483-023-3056-6","DOIUrl":null,"url":null,"abstract":"<div><p>The dispersion curves of bulk waves propagating in both AlN and ZnO film bulk acoustic resonators (FBARs) are presented to illustrate the mode flip of the thickness-extensional (TE) and 2nd thickness-shear (TSh2) modes. The frequency spectrum quantitative prediction (FSQP) method is used to solve the frequency spectra for predicting the coupling strength among the eigen-modes in AlN and ZnO FBARs. The results elaborate that the flip of the TE and TSh2 branches results in novel self-coupling vibration between the small-wavenumber TE and large-wavenumber TE modes, which has never been observed in the ZnO FBAR. Besides, the mode flip leads to the change in the relative positions of the frequency spectral curves about the TE cut-off frequency. The obtained frequency spectra can be used to predict the mode-coupling behaviors of the vibration modes in the AlN FBAR. The conclusions drawn from the results can help to distinguish the desirable operation modes of the AlN FBAR with very weak coupling strength from all vibration modes.</p></div>","PeriodicalId":55498,"journal":{"name":"Applied Mathematics and Mechanics-English Edition","volume":"44 12","pages":"2187 - 2206"},"PeriodicalIF":4.5000,"publicationDate":"2023-11-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode\",\"authors\":\"Zinan Zhao, Nian Li, Yilin Qu, Weiqiu Chen\",\"doi\":\"10.1007/s10483-023-3056-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The dispersion curves of bulk waves propagating in both AlN and ZnO film bulk acoustic resonators (FBARs) are presented to illustrate the mode flip of the thickness-extensional (TE) and 2nd thickness-shear (TSh2) modes. The frequency spectrum quantitative prediction (FSQP) method is used to solve the frequency spectra for predicting the coupling strength among the eigen-modes in AlN and ZnO FBARs. The results elaborate that the flip of the TE and TSh2 branches results in novel self-coupling vibration between the small-wavenumber TE and large-wavenumber TE modes, which has never been observed in the ZnO FBAR. Besides, the mode flip leads to the change in the relative positions of the frequency spectral curves about the TE cut-off frequency. The obtained frequency spectra can be used to predict the mode-coupling behaviors of the vibration modes in the AlN FBAR. The conclusions drawn from the results can help to distinguish the desirable operation modes of the AlN FBAR with very weak coupling strength from all vibration modes.</p></div>\",\"PeriodicalId\":55498,\"journal\":{\"name\":\"Applied Mathematics and Mechanics-English Edition\",\"volume\":\"44 12\",\"pages\":\"2187 - 2206\"},\"PeriodicalIF\":4.5000,\"publicationDate\":\"2023-11-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Mathematics and Mechanics-English Edition\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s10483-023-3056-6\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MATHEMATICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Mathematics and Mechanics-English Edition","FirstCategoryId":"1087","ListUrlMain":"https://link.springer.com/article/10.1007/s10483-023-3056-6","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATHEMATICS, APPLIED","Score":null,"Total":0}
Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode
The dispersion curves of bulk waves propagating in both AlN and ZnO film bulk acoustic resonators (FBARs) are presented to illustrate the mode flip of the thickness-extensional (TE) and 2nd thickness-shear (TSh2) modes. The frequency spectrum quantitative prediction (FSQP) method is used to solve the frequency spectra for predicting the coupling strength among the eigen-modes in AlN and ZnO FBARs. The results elaborate that the flip of the TE and TSh2 branches results in novel self-coupling vibration between the small-wavenumber TE and large-wavenumber TE modes, which has never been observed in the ZnO FBAR. Besides, the mode flip leads to the change in the relative positions of the frequency spectral curves about the TE cut-off frequency. The obtained frequency spectra can be used to predict the mode-coupling behaviors of the vibration modes in the AlN FBAR. The conclusions drawn from the results can help to distinguish the desirable operation modes of the AlN FBAR with very weak coupling strength from all vibration modes.
期刊介绍：
Applied Mathematics and Mechanics is the English version of a journal on applied mathematics and mechanics published in the People''s Republic of China. Our Editorial Committee, headed by Professor Chien Weizang, Ph.D., President of Shanghai University, consists of scientists in the fields of applied mathematics and mechanics from all over China.
Founded by Professor Chien Weizang in 1980, Applied Mathematics and Mechanics became a bimonthly in 1981 and then a monthly in 1985. It is a comprehensive journal presenting original research papers on mechanics, mathematical methods and modeling in mechanics as well as applied mathematics relevant to neoteric mechanics.
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