{"title":"微系统应用的氧化铝陶瓷微加工:系统综述、挑战和未来机遇","authors":"Anurag Shanu, Priyaranjan Sharma, Pradeep Dixit","doi":"10.1080/10426914.2023.2290244","DOIUrl":null,"url":null,"abstract":"This review article presents the current status of various micromachining techniques used to create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in various radio-f...","PeriodicalId":18266,"journal":{"name":"Materials and Manufacturing Processes","volume":null,"pages":null},"PeriodicalIF":4.1000,"publicationDate":"2023-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities\",\"authors\":\"Anurag Shanu, Priyaranjan Sharma, Pradeep Dixit\",\"doi\":\"10.1080/10426914.2023.2290244\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This review article presents the current status of various micromachining techniques used to create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in various radio-f...\",\"PeriodicalId\":18266,\"journal\":{\"name\":\"Materials and Manufacturing Processes\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2023-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials and Manufacturing Processes\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1080/10426914.2023.2290244\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, MANUFACTURING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials and Manufacturing Processes","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1080/10426914.2023.2290244","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities
This review article presents the current status of various micromachining techniques used to create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in various radio-f...
期刊介绍：
Materials and Manufacturing Processes deals with issues that result in better utilization of raw materials and energy, integration of design and manufacturing activities requiring the invention of suitable new manufacturing processes and techniques, unmanned production dependent on efficient and reliable control of various processes including intelligent processing, introduction of new materials in industrial production necessitating new manufacturing process technology, and more. Information is offered in various formats, including research articles, letter reports, review articles, conference papers, applied research, book and conference reviews, and entire issues devoted to symposia.
All submitted manuscripts are subject to initial appraisal by the Editors, and, if found suitable for further consideration, to peer review by independent, anonymous expert referees. All peer review is single blind and submission is online via ScholarOne Manuscripts.
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