等离子体增强化学气相沉积在各种衬底上的气体薄膜

IF 0.9 4区化学 Q4 CHEMISTRY, PHYSICAL High Energy Chemistry Pub Date : 2023-11-30 DOI:10.1134/s0018143923060097

M. A. Kudryashov, L. A. Mochalov, I. O. Prokhorov, M. A. Vshivtsev, Yu. P. Kudryashova, V. M. Malyshev, E. A. Slapovskaya

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引用次数: 0

摘要

摘要单硫化镓(GaS)是一种宽带隙半导体，是III族单硫族层状材料的代表。它被认为是在光谱的蓝色和近紫外范围内的光探测器的理想材料。在这项工作中，首次应用等离子体增强化学气相沉积(PECVD)的方法在各种衬底上获得了薄的气体薄膜，其中高纯镓和硫作为起始材料。为了启动反应物之间的相互作用，使用了压力为0.1 torr的非平衡射频放电(40.68 MHz)等离子体。研究了衬底性质对气体薄膜化学计量、结构和表面形貌的影响。等离子体化学过程采用发射光谱法进行监测。

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Plasma-Enhanced Chemical Vapor Deposition of Thin GaS Films on Various Types of Substrates

Abstract

Gallium monosulfide (GaS), a representative of Group III monochalcogenide layered materials, is a wide-bandgap semiconductor. It is considered an ideal material for light detectors in the blue and near ultraviolet ranges of the spectrum. In this work, for the first time, the method of plasma-enhanced chemical vapor deposition (PECVD) was applied to obtain thin GaS films on various substrates, where high-purity gallium and sulfur served as starting materials. To initiate the interaction between the reactants, a nonequilibrium RF discharge (40.68 MHz) plasma at a pressure of 0.1 torr was used. The influence of the substrate nature on the stoichiometry, structure, and surface morphology of GaS films has been studied. The plasma-chemical process was monitored using optical emission spectroscopy.

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来源期刊

High Energy Chemistry 化学-物理化学

CiteScore

1.50

自引率

28.60%

发文量

审稿时长

6-12 weeks

期刊介绍： High Energy Chemistry publishes original articles, reviews, and short communications on molecular and supramolecular photochemistry, photobiology, radiation chemistry, plasma chemistry, chemistry of nanosized systems, chemistry of new atoms, processes and materials for optical information systems and other areas of high energy chemistry. It publishes theoretical and experimental studies in all areas of high energy chemistry, such as the interaction of high-energy particles with matter, the nature and reactivity of short-lived species induced by the action of particle and electromagnetic radiation or hot atoms on substances in their gaseous and condensed states, and chemical processes initiated in organic and inorganic systems by high-energy radiation.