Liam Chandler, Oliver J. Barker, Alexander J. Wright, Liam O'Brien, Sam Coates, Ronan McGrath, Ron Lifshitz, Hem Raj Sharma
{"title":"用热扫描探针光刻技术制作准周期性顶棚","authors":"Liam Chandler, Oliver J. Barker, Alexander J. Wright, Liam O'Brien, Sam Coates, Ronan McGrath, Ron Lifshitz, Hem Raj Sharma","doi":"10.1002/ijch.202300115","DOIUrl":null,"url":null,"abstract":"<h2>1 Introduction</h2>\n<p>Quasicrystals exhibit long-range aperiodic order which distinguishes them from periodic crystalline materials. Since their discovery, a major research effort has been undertaken to understand their structure and properties.<span><sup>1, 2</sup></span> Characterising the physical properties of atomic-scale quasicrystals poses several challenges, primarily due to the aperiodic arrangement of atoms, which complicates structure determination and requires advanced measurement techniques.<span><sup>3</sup></span> In particular, the repertoire of quasicrystals available is limited to certain structures, such as icosahedral, decagonal, and dodecagonal systems.</p>\n<p>Quasicrystals are grown with Czochralski, Bridgman, Floating Zone, or Self-Flux methods.<span><sup>4, 5</sup></span> Growth conditions such as temperature, pressure, and composition, are carefully controlled to produce high-quality quasicrystals with desired properties. Characterising the properties of the bulk and surfaces of quasicrystals is performed with various diffraction, spectroscopic and microscopy techniques.<span><sup>6</sup></span> Pseudomorphic systems of atomic overlayers on quasicrystal surfaces have also been grown.<span><sup>7</sup></span> Overall, the preparation and characterisation of quasicrystals is challenging, spurring novel approaches.</p>\n<p>Nanolithography techniques encompass artificial fabrication or manipulation of nanoscale structures to create patterns on a substrate. At the nano- to mesoscopic scale, nanolithography fabrication techniques open new possibilities for precisely engineering the size, shape, and arrangement of nanostructures, thus enabling tailored functionalities.<span><sup>8-11</sup></span> Quasicrystalline nanostructures have demonstrated exceptional properties with enhanced solar efficiency,<span><sup>12, 13</sup></span> improved catalytic performance,<span><sup>14</sup></span> and thermoelectric applications.<span><sup>15-17</sup></span></p>\n<p>Quasiperiodic tilings model the surface of quasicrystals and have the potential to be fabricated with established nanolithography techniques.<span><sup>18</sup></span> Broadly, there are three main nanolithography techniques described in the literature which are used to produce quasiperiodic tilings (see Table 1): scanning probe lithography (SPL), electron-beam lithography (EBL), and photolithography. In SPL a direct-write probe manipulates a substrate surface by rearranging, etching, or removing the atoms or molecules, either chemically or physically. Techniques such as thermal-scanning probe lithography (t-SPL) remove surface atoms or molecules by thermal sublimation with a heated probe.<span><sup>19</sup></span> The resolution of SPL techniques is limited by the probe dimensions. EBL involves irradiating a surface with a focused beam of electrons through a mask covering specific areas of the substrate, or directly writing a pattern similar to SPL with e-beam resists. Resists are materials, typically polymeric, which are designed to break down under certain stimuli to transfer a pattern from a mask or directly onto a substrate. EBL resolution is limited by the de-Broglie wavelength of electrons interacting with the resist, although unlike a direct-write process such as SPL, charging and proximity effects need to be corrected for. Finally in photolithography a light-sensitive photoresist is patterned with incident photons, through a mask or a directly focused beam. With this technique, quasiperiodic Moiré patterns emerge with multiple interference beams with incommensurately modulated periodicity, spatial frequency, or angles.<span><sup>20</sup></span> The resolution is poorer than in SPL or EBL, due to the long wavelength of the photons employed in these techniques. Table 1 summarises the recent nanolithographic fabrication of quasiperiodic tilings, listing the techniques used and a brief description of the tilings explored and key results.\n</p>\n<div>\n<header><span>Table 1. </span>Quasiperiodic tilings fabricated with various nanolithography techniques.</header>\n<div tabindex=\"0\">\n<table>\n<thead>\n<tr>\n<th><p>Technique</p></th>\n<th><p>Description</p></th>\n<th><p>Authors</p></th>\n</tr>\n</thead>\n<tbody>\n<tr>\n<td><p>t-SPL</p></td>\n<td><p>12-fold reciprocal space etched grating</p>\n<p>for photolithography.</p></td>\n<td><p>Lassaline, et al.<span><sup>21</sup></span></p>\n<p> </p></td>\n</tr>\n<tr>\n<td><p>EBL</p></td>\n<td><p>10-fold Penrose<span><sup>22</sup></span> and Fibonacci<span><sup>23</sup></span></p>\n<p>superconducting pinning arrays.</p></td>\n<td><p>Kemmler, et al.<span><sup>22</sup></span> and Villegas, et al.<span><sup>23</sup></span></p></td>\n</tr>\n<tr>\n<td><p> </p></td>\n<td><p>12-fold air holes as an anti-reflection</p>\n<p>layer of a solar cell.</p></td>\n<td><p>Mericer, et al.<span><sup>12</sup></span></p></td>\n</tr>\n<tr>\n<td><p> </p></td>\n<td><p>10-fold Penrose tiling as an artificial</p>\n<p>spin-ice with disconnected edges.</p></td>\n<td><p>Shi, et al.<span><sup>24</sup></span></p></td>\n</tr>\n<tr>\n<td><p> </p></td>\n<td><p>Magnetic Properties of 10-fold Penrose</p>\n<p>and 8-fold Ammann-Beenker tilings.</p></td>\n<td><p>Bhat, Farmer, Sung, et al.<span><sup>25-30</sup></span></p></td>\n</tr>\n<tr>\n<td><p>Photolithography</p></td>\n<td><p>High-symmetry photonic quasicrystals</p>\n<p>fabricated with photolithography techniques</p>\n<p>from 7- up to 36-fold centred structures,</p>\n<p>with a range of applications and approaches.</p></td>\n<td><p>Varadarajan and Shekar,<span><sup>13</sup></span> Mahmood, et al.,<span><sup>20</sup></span></p>\n<p>Yang and Wangl,<span><sup>31</sup></span> Vitiello, et al.,<span><sup>32</sup></span></p>\n<p>Xi and Sun,<span><sup>33</sup></span> Langner, et al.,<span><sup>34</sup></span> and Gao and Liu<span><sup>35</sup></span></p></td>\n</tr>\n</tbody>\n</table>\n</div>\n<div></div>\n</div>\n<p>This paper aims to pedagogically demonstrate the associated challenges with fabricating quasiperiodic systems, and how to overcome these challenges, using a t-SPL technique. Results of successfully fabricated tilings, with a range of possible uses, are presented.</p>","PeriodicalId":14686,"journal":{"name":"Israel Journal of Chemistry","volume":null,"pages":null},"PeriodicalIF":2.3000,"publicationDate":"2023-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabricating Quasiperiodic Tilings with Thermal-Scanning Probe Lithography\",\"authors\":\"Liam Chandler, Oliver J. Barker, Alexander J. Wright, Liam O'Brien, Sam Coates, Ronan McGrath, Ron Lifshitz, Hem Raj Sharma\",\"doi\":\"10.1002/ijch.202300115\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<h2>1 Introduction</h2>\\n<p>Quasicrystals exhibit long-range aperiodic order which distinguishes them from periodic crystalline materials. Since their discovery, a major research effort has been undertaken to understand their structure and properties.<span><sup>1, 2</sup></span> Characterising the physical properties of atomic-scale quasicrystals poses several challenges, primarily due to the aperiodic arrangement of atoms, which complicates structure determination and requires advanced measurement techniques.<span><sup>3</sup></span> In particular, the repertoire of quasicrystals available is limited to certain structures, such as icosahedral, decagonal, and dodecagonal systems.</p>\\n<p>Quasicrystals are grown with Czochralski, Bridgman, Floating Zone, or Self-Flux methods.<span><sup>4, 5</sup></span> Growth conditions such as temperature, pressure, and composition, are carefully controlled to produce high-quality quasicrystals with desired properties. Characterising the properties of the bulk and surfaces of quasicrystals is performed with various diffraction, spectroscopic and microscopy techniques.<span><sup>6</sup></span> Pseudomorphic systems of atomic overlayers on quasicrystal surfaces have also been grown.<span><sup>7</sup></span> Overall, the preparation and characterisation of quasicrystals is challenging, spurring novel approaches.</p>\\n<p>Nanolithography techniques encompass artificial fabrication or manipulation of nanoscale structures to create patterns on a substrate. At the nano- to mesoscopic scale, nanolithography fabrication techniques open new possibilities for precisely engineering the size, shape, and arrangement of nanostructures, thus enabling tailored functionalities.<span><sup>8-11</sup></span> Quasicrystalline nanostructures have demonstrated exceptional properties with enhanced solar efficiency,<span><sup>12, 13</sup></span> improved catalytic performance,<span><sup>14</sup></span> and thermoelectric applications.<span><sup>15-17</sup></span></p>\\n<p>Quasiperiodic tilings model the surface of quasicrystals and have the potential to be fabricated with established nanolithography techniques.<span><sup>18</sup></span> Broadly, there are three main nanolithography techniques described in the literature which are used to produce quasiperiodic tilings (see Table 1): scanning probe lithography (SPL), electron-beam lithography (EBL), and photolithography. In SPL a direct-write probe manipulates a substrate surface by rearranging, etching, or removing the atoms or molecules, either chemically or physically. Techniques such as thermal-scanning probe lithography (t-SPL) remove surface atoms or molecules by thermal sublimation with a heated probe.<span><sup>19</sup></span> The resolution of SPL techniques is limited by the probe dimensions. EBL involves irradiating a surface with a focused beam of electrons through a mask covering specific areas of the substrate, or directly writing a pattern similar to SPL with e-beam resists. Resists are materials, typically polymeric, which are designed to break down under certain stimuli to transfer a pattern from a mask or directly onto a substrate. EBL resolution is limited by the de-Broglie wavelength of electrons interacting with the resist, although unlike a direct-write process such as SPL, charging and proximity effects need to be corrected for. Finally in photolithography a light-sensitive photoresist is patterned with incident photons, through a mask or a directly focused beam. With this technique, quasiperiodic Moiré patterns emerge with multiple interference beams with incommensurately modulated periodicity, spatial frequency, or angles.<span><sup>20</sup></span> The resolution is poorer than in SPL or EBL, due to the long wavelength of the photons employed in these techniques. Table 1 summarises the recent nanolithographic fabrication of quasiperiodic tilings, listing the techniques used and a brief description of the tilings explored and key results.\\n</p>\\n<div>\\n<header><span>Table 1. </span>Quasiperiodic tilings fabricated with various nanolithography techniques.</header>\\n<div tabindex=\\\"0\\\">\\n<table>\\n<thead>\\n<tr>\\n<th><p>Technique</p></th>\\n<th><p>Description</p></th>\\n<th><p>Authors</p></th>\\n</tr>\\n</thead>\\n<tbody>\\n<tr>\\n<td><p>t-SPL</p></td>\\n<td><p>12-fold reciprocal space etched grating</p>\\n<p>for photolithography.</p></td>\\n<td><p>Lassaline, et al.<span><sup>21</sup></span></p>\\n<p> </p></td>\\n</tr>\\n<tr>\\n<td><p>EBL</p></td>\\n<td><p>10-fold Penrose<span><sup>22</sup></span> and Fibonacci<span><sup>23</sup></span></p>\\n<p>superconducting pinning arrays.</p></td>\\n<td><p>Kemmler, et al.<span><sup>22</sup></span> and Villegas, et al.<span><sup>23</sup></span></p></td>\\n</tr>\\n<tr>\\n<td><p> </p></td>\\n<td><p>12-fold air holes as an anti-reflection</p>\\n<p>layer of a solar cell.</p></td>\\n<td><p>Mericer, et al.<span><sup>12</sup></span></p></td>\\n</tr>\\n<tr>\\n<td><p> </p></td>\\n<td><p>10-fold Penrose tiling as an artificial</p>\\n<p>spin-ice with disconnected edges.</p></td>\\n<td><p>Shi, et al.<span><sup>24</sup></span></p></td>\\n</tr>\\n<tr>\\n<td><p> </p></td>\\n<td><p>Magnetic Properties of 10-fold Penrose</p>\\n<p>and 8-fold Ammann-Beenker tilings.</p></td>\\n<td><p>Bhat, Farmer, Sung, et al.<span><sup>25-30</sup></span></p></td>\\n</tr>\\n<tr>\\n<td><p>Photolithography</p></td>\\n<td><p>High-symmetry photonic quasicrystals</p>\\n<p>fabricated with photolithography techniques</p>\\n<p>from 7- up to 36-fold centred structures,</p>\\n<p>with a range of applications and approaches.</p></td>\\n<td><p>Varadarajan and Shekar,<span><sup>13</sup></span> Mahmood, et al.,<span><sup>20</sup></span></p>\\n<p>Yang and Wangl,<span><sup>31</sup></span> Vitiello, et al.,<span><sup>32</sup></span></p>\\n<p>Xi and Sun,<span><sup>33</sup></span> Langner, et al.,<span><sup>34</sup></span> and Gao and Liu<span><sup>35</sup></span></p></td>\\n</tr>\\n</tbody>\\n</table>\\n</div>\\n<div></div>\\n</div>\\n<p>This paper aims to pedagogically demonstrate the associated challenges with fabricating quasiperiodic systems, and how to overcome these challenges, using a t-SPL technique. Results of successfully fabricated tilings, with a range of possible uses, are presented.</p>\",\"PeriodicalId\":14686,\"journal\":{\"name\":\"Israel Journal of Chemistry\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.3000,\"publicationDate\":\"2023-12-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Israel Journal of Chemistry\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://doi.org/10.1002/ijch.202300115\",\"RegionNum\":4,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Israel Journal of Chemistry","FirstCategoryId":"92","ListUrlMain":"https://doi.org/10.1002/ijch.202300115","RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
Fabricating Quasiperiodic Tilings with Thermal-Scanning Probe Lithography
1 Introduction
Quasicrystals exhibit long-range aperiodic order which distinguishes them from periodic crystalline materials. Since their discovery, a major research effort has been undertaken to understand their structure and properties.1, 2 Characterising the physical properties of atomic-scale quasicrystals poses several challenges, primarily due to the aperiodic arrangement of atoms, which complicates structure determination and requires advanced measurement techniques.3 In particular, the repertoire of quasicrystals available is limited to certain structures, such as icosahedral, decagonal, and dodecagonal systems.
Quasicrystals are grown with Czochralski, Bridgman, Floating Zone, or Self-Flux methods.4, 5 Growth conditions such as temperature, pressure, and composition, are carefully controlled to produce high-quality quasicrystals with desired properties. Characterising the properties of the bulk and surfaces of quasicrystals is performed with various diffraction, spectroscopic and microscopy techniques.6 Pseudomorphic systems of atomic overlayers on quasicrystal surfaces have also been grown.7 Overall, the preparation and characterisation of quasicrystals is challenging, spurring novel approaches.
Nanolithography techniques encompass artificial fabrication or manipulation of nanoscale structures to create patterns on a substrate. At the nano- to mesoscopic scale, nanolithography fabrication techniques open new possibilities for precisely engineering the size, shape, and arrangement of nanostructures, thus enabling tailored functionalities.8-11 Quasicrystalline nanostructures have demonstrated exceptional properties with enhanced solar efficiency,12, 13 improved catalytic performance,14 and thermoelectric applications.15-17
Quasiperiodic tilings model the surface of quasicrystals and have the potential to be fabricated with established nanolithography techniques.18 Broadly, there are three main nanolithography techniques described in the literature which are used to produce quasiperiodic tilings (see Table 1): scanning probe lithography (SPL), electron-beam lithography (EBL), and photolithography. In SPL a direct-write probe manipulates a substrate surface by rearranging, etching, or removing the atoms or molecules, either chemically or physically. Techniques such as thermal-scanning probe lithography (t-SPL) remove surface atoms or molecules by thermal sublimation with a heated probe.19 The resolution of SPL techniques is limited by the probe dimensions. EBL involves irradiating a surface with a focused beam of electrons through a mask covering specific areas of the substrate, or directly writing a pattern similar to SPL with e-beam resists. Resists are materials, typically polymeric, which are designed to break down under certain stimuli to transfer a pattern from a mask or directly onto a substrate. EBL resolution is limited by the de-Broglie wavelength of electrons interacting with the resist, although unlike a direct-write process such as SPL, charging and proximity effects need to be corrected for. Finally in photolithography a light-sensitive photoresist is patterned with incident photons, through a mask or a directly focused beam. With this technique, quasiperiodic Moiré patterns emerge with multiple interference beams with incommensurately modulated periodicity, spatial frequency, or angles.20 The resolution is poorer than in SPL or EBL, due to the long wavelength of the photons employed in these techniques. Table 1 summarises the recent nanolithographic fabrication of quasiperiodic tilings, listing the techniques used and a brief description of the tilings explored and key results.
Table 1. Quasiperiodic tilings fabricated with various nanolithography techniques.
Technique
Description
Authors
t-SPL
12-fold reciprocal space etched grating
for photolithography.
Lassaline, et al.21
EBL
10-fold Penrose22 and Fibonacci23
superconducting pinning arrays.
Kemmler, et al.22 and Villegas, et al.23
12-fold air holes as an anti-reflection
layer of a solar cell.
Mericer, et al.12
10-fold Penrose tiling as an artificial
spin-ice with disconnected edges.
Shi, et al.24
Magnetic Properties of 10-fold Penrose
and 8-fold Ammann-Beenker tilings.
Bhat, Farmer, Sung, et al.25-30
Photolithography
High-symmetry photonic quasicrystals
fabricated with photolithography techniques
from 7- up to 36-fold centred structures,
with a range of applications and approaches.
Varadarajan and Shekar,13 Mahmood, et al.,20
Yang and Wangl,31 Vitiello, et al.,32
Xi and Sun,33 Langner, et al.,34 and Gao and Liu35
This paper aims to pedagogically demonstrate the associated challenges with fabricating quasiperiodic systems, and how to overcome these challenges, using a t-SPL technique. Results of successfully fabricated tilings, with a range of possible uses, are presented.
期刊介绍:
The fledgling State of Israel began to publish its scientific activity in 1951 under the general heading of Bulletin of the Research Council of Israel, which quickly split into sections to accommodate various fields in the growing academic community. In 1963, the Bulletin ceased publication and independent journals were born, with Section A becoming the new Israel Journal of Chemistry.
The Israel Journal of Chemistry is the official journal of the Israel Chemical Society. Effective from Volume 50 (2010) it is published by Wiley-VCH.
The Israel Journal of Chemistry is an international and peer-reviewed publication forum for Special Issues on timely research topics in all fields of chemistry: from biochemistry through organic and inorganic chemistry to polymer, physical and theoretical chemistry, including all interdisciplinary topics. Each topical issue is edited by one or several Guest Editors and primarily contains invited Review articles. Communications and Full Papers may be published occasionally, if they fit with the quality standards of the journal. The publication language is English and the journal is published twelve times a year.