具有强 Duffing 非线性的微型机械谐振器中的一对二内部共振

IF 2.4 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micromechanics and Microengineering Pub Date : 2023-12-11 DOI:10.1088/1361-6439/ad0de8
Jun Yu, Ata Donmez, Hansaja Herath, Hanna Cho
{"title":"具有强 Duffing 非线性的微型机械谐振器中的一对二内部共振","authors":"Jun Yu, Ata Donmez, Hansaja Herath, Hanna Cho","doi":"10.1088/1361-6439/ad0de8","DOIUrl":null,"url":null,"abstract":"This paper investigates the implementation of 1:2 internal resonance (InRes) in a clamped–clamped stepped beam resonator with a strong Duffing effect, focusing on its potential for frequency stabilization in micro-electro-mechanical systems (MEMS) resonators. InRes can arise in a nonlinear system of which mode frequencies are close to an integer ratio, facilitating the internal exchange of energy from an externally driven mode to an undriven mode. The presence of 1:2 InRes and Duffing hardening nonlinearity can result in frequency saturation phenomena, leading to a flat amplitude-frequency response range, which forms the basis for frequency stabilization. The stepped beam resonator design, combined with thermal frequency tuning, enables precise alteration of the frequency ratio between the second and third flexural modes required to achieve the desired 1:2 ratio for InRes. Experimental characterization and theoretical analysis revealed that frequency mismatch plays a significant role, with larger mismatch conditions leading to stronger energy exchange and a wider range of drive force for frequency saturation. The study highlights the frequency saturation mechanism utilizing 1:2 InRes and emphasizes the advantage of Duffing nonlinearity and larger intermodal frequency mismatch for broader frequency stabilization, providing valuable insights for the design and optimization of MEMS resonators.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"1 1","pages":""},"PeriodicalIF":2.4000,"publicationDate":"2023-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"One-to-two internal resonance in a micro-mechanical resonator with strong Duffing nonlinearity\",\"authors\":\"Jun Yu, Ata Donmez, Hansaja Herath, Hanna Cho\",\"doi\":\"10.1088/1361-6439/ad0de8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper investigates the implementation of 1:2 internal resonance (InRes) in a clamped–clamped stepped beam resonator with a strong Duffing effect, focusing on its potential for frequency stabilization in micro-electro-mechanical systems (MEMS) resonators. InRes can arise in a nonlinear system of which mode frequencies are close to an integer ratio, facilitating the internal exchange of energy from an externally driven mode to an undriven mode. The presence of 1:2 InRes and Duffing hardening nonlinearity can result in frequency saturation phenomena, leading to a flat amplitude-frequency response range, which forms the basis for frequency stabilization. The stepped beam resonator design, combined with thermal frequency tuning, enables precise alteration of the frequency ratio between the second and third flexural modes required to achieve the desired 1:2 ratio for InRes. Experimental characterization and theoretical analysis revealed that frequency mismatch plays a significant role, with larger mismatch conditions leading to stronger energy exchange and a wider range of drive force for frequency saturation. The study highlights the frequency saturation mechanism utilizing 1:2 InRes and emphasizes the advantage of Duffing nonlinearity and larger intermodal frequency mismatch for broader frequency stabilization, providing valuable insights for the design and optimization of MEMS resonators.\",\"PeriodicalId\":16346,\"journal\":{\"name\":\"Journal of Micromechanics and Microengineering\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":2.4000,\"publicationDate\":\"2023-12-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Micromechanics and Microengineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6439/ad0de8\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micromechanics and Microengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6439/ad0de8","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

摘要

本文研究了在具有强烈达芬效应的钳夹式阶梯梁谐振器中实现 1:2 内部共振(InRes)的问题,重点关注其在微机电系统(MEMS)谐振器中稳定频率的潜力。在非线性系统中,模态频率接近整数比时就会产生 InRes,从而促进外部驱动模态与非驱动模态之间的内部能量交换。1:2 InRes 和 Duffing硬化非线性的存在会导致频率饱和现象,从而形成平坦的振幅-频率响应范围,这也是频率稳定的基础。阶梯梁谐振器设计与热频率调谐相结合,可以精确改变第二和第三挠曲模式之间的频率比,从而实现所需的 1:2 InRes 比。实验表征和理论分析表明,频率失配起着重要作用,失配条件越大,能量交换越强,频率饱和的驱动力范围越广。这项研究突出了利用 1:2 InRes 的频率饱和机制,强调了 Duffing 非线性和更大的模式间频率失配在更广泛的频率稳定方面的优势,为 MEMS 谐振器的设计和优化提供了宝贵的见解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
One-to-two internal resonance in a micro-mechanical resonator with strong Duffing nonlinearity
This paper investigates the implementation of 1:2 internal resonance (InRes) in a clamped–clamped stepped beam resonator with a strong Duffing effect, focusing on its potential for frequency stabilization in micro-electro-mechanical systems (MEMS) resonators. InRes can arise in a nonlinear system of which mode frequencies are close to an integer ratio, facilitating the internal exchange of energy from an externally driven mode to an undriven mode. The presence of 1:2 InRes and Duffing hardening nonlinearity can result in frequency saturation phenomena, leading to a flat amplitude-frequency response range, which forms the basis for frequency stabilization. The stepped beam resonator design, combined with thermal frequency tuning, enables precise alteration of the frequency ratio between the second and third flexural modes required to achieve the desired 1:2 ratio for InRes. Experimental characterization and theoretical analysis revealed that frequency mismatch plays a significant role, with larger mismatch conditions leading to stronger energy exchange and a wider range of drive force for frequency saturation. The study highlights the frequency saturation mechanism utilizing 1:2 InRes and emphasizes the advantage of Duffing nonlinearity and larger intermodal frequency mismatch for broader frequency stabilization, providing valuable insights for the design and optimization of MEMS resonators.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Journal of Micromechanics and Microengineering
Journal of Micromechanics and Microengineering 工程技术-材料科学:综合
CiteScore
4.50
自引率
4.30%
发文量
136
审稿时长
2.8 months
期刊介绍: Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.
期刊最新文献
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces Design and performance analysis of an embedded amplified piezoelectric jetting dispensing valve Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces Fabrication of ultra-low expansion glass based double paddle oscillator Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1