利用热扫描探针光刻技术生成平滑的电位图形

Nolan Lassaline
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摘要

扫描探针显微镜(SPM)使用锋利的针尖对表面进行原子精度的探测。机械能、电能或热能等输入可激活高度局部化的相互作用,为在小长度尺度上操纵材料提供了一类功能强大的仪器。热扫描探针光刻(tSPL)是一种先进的 SPM 变体,它使用加热悬臂上的硅针尖局部升华聚合物抗蚀剂,同时充当高分辨率光刻工具和扫描探针显微镜。tSPL 的主要优点是能够电控针尖的温度和作用力,从而产生传统纳米制造技术无法实现的光滑表面。最近的研究利用这些表面生成了潜在的地貌,增强了对光子、电子、激子和纳米粒子的控制,展示了广泛的实验可能性。本文概述了产生平滑电位的 tSPL 的原理、程序和局限性,并讨论了其在光子学、电子学和纳米材料科学中的应用前景。
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Generating smooth potential landscapes with thermal scanning-probe lithography
Scanning probe microscopy (SPM) uses a sharp tip to interrogate surfaces with atomic precision. Inputs such as mechanical, electrical, or thermal energy can activate highly localized interactions, providing a powerful class of instruments for manipulating materials on small length scales. Thermal scanning-probe lithography (tSPL) is an advanced SPM variant that uses a silicon tip on a heated cantilever to locally sublimate polymer resist, acting as a high-resolution lithography tool and a scanning probe microscope simultaneously. The main advantage of tSPL is the ability to electrically control the temperature and applied force of the tip, which can produce smooth topographical surfaces that are unattainable with conventional nanofabrication techniques. Recent investigations have exploited these surfaces to generate potential landscapes for enhanced control of photons, electrons, excitons, and nanoparticles, demonstrating a broad range of experimental possibilities. This paper outlines the principles, procedures, and limitations of tSPL for generating smooth potentials and discusses the prospective impact in photonics, electronics, and nanomaterials science.
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