{"title":"温度对外部润湿 EMI-Im 离子液体离子源电喷雾电流的影响","authors":"Y. Fujiwara","doi":"10.1116/6.0003088","DOIUrl":null,"url":null,"abstract":"Ionic liquid ion sources are expected to be used in a wide range of applications such as space electric propulsion and focused ion beam micromachining. It is known that the backstreaming of secondary charged species generated by ion beam impacts can cause unexpected temperature rise and chemical changes in ionic liquids. This paper reports on results of heating experiments using a sharp needle emitter wetted with an ionic liquid, 1-ethyl-3-methyl imidazolium bis(trifluoromethanesulfonyl)amide, at temperatures in a range from room temperature to 120 °C. Current measurements show that positive and negative electrospray currents from the heated emitter increased as the temperature increased. Time-of-flight (TOF) mass spectrometric measurements reveal that the beam composition changed significantly with increasing temperature, indicating that charged droplets as well as ions were emitted from the heated emitter. The TOF data show that a significant fraction of the current is due to droplets at higher temperatures. On the basis of the results obtained, the size and charge of the emitted droplets are discussed. The beam is roughly estimated to contain charged droplets with a diameter of around 20 nm at 120 °C.","PeriodicalId":282302,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"53 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Temperature effects on electrospray current from an externally wetted EMI-Im ionic liquid ion source\",\"authors\":\"Y. Fujiwara\",\"doi\":\"10.1116/6.0003088\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Ionic liquid ion sources are expected to be used in a wide range of applications such as space electric propulsion and focused ion beam micromachining. It is known that the backstreaming of secondary charged species generated by ion beam impacts can cause unexpected temperature rise and chemical changes in ionic liquids. This paper reports on results of heating experiments using a sharp needle emitter wetted with an ionic liquid, 1-ethyl-3-methyl imidazolium bis(trifluoromethanesulfonyl)amide, at temperatures in a range from room temperature to 120 °C. Current measurements show that positive and negative electrospray currents from the heated emitter increased as the temperature increased. Time-of-flight (TOF) mass spectrometric measurements reveal that the beam composition changed significantly with increasing temperature, indicating that charged droplets as well as ions were emitted from the heated emitter. The TOF data show that a significant fraction of the current is due to droplets at higher temperatures. On the basis of the results obtained, the size and charge of the emitted droplets are discussed. The beam is roughly estimated to contain charged droplets with a diameter of around 20 nm at 120 °C.\",\"PeriodicalId\":282302,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology B\",\"volume\":\"53 3\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0003088\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003088","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Temperature effects on electrospray current from an externally wetted EMI-Im ionic liquid ion source
Ionic liquid ion sources are expected to be used in a wide range of applications such as space electric propulsion and focused ion beam micromachining. It is known that the backstreaming of secondary charged species generated by ion beam impacts can cause unexpected temperature rise and chemical changes in ionic liquids. This paper reports on results of heating experiments using a sharp needle emitter wetted with an ionic liquid, 1-ethyl-3-methyl imidazolium bis(trifluoromethanesulfonyl)amide, at temperatures in a range from room temperature to 120 °C. Current measurements show that positive and negative electrospray currents from the heated emitter increased as the temperature increased. Time-of-flight (TOF) mass spectrometric measurements reveal that the beam composition changed significantly with increasing temperature, indicating that charged droplets as well as ions were emitted from the heated emitter. The TOF data show that a significant fraction of the current is due to droplets at higher temperatures. On the basis of the results obtained, the size and charge of the emitted droplets are discussed. The beam is roughly estimated to contain charged droplets with a diameter of around 20 nm at 120 °C.