通过喷雾热解技术制备石墨烯基掺氟二氧化锡薄膜并确定其特性

Sherif A. Khaleel, Mahmoud Shaban, M. F. Alsharekh, Ehab K. I. Hamad, Mohamed I. M. Shehata
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摘要

摘要 本研究采用低成本喷雾热解方法,在基底温度为 500 ℃ 的条件下制备了掺氟氧化锡(FTO)和掺氟石墨烯(G-FTO)薄膜。在制备 FTO 时,将氯化亚锡溶解在甲醇和乙酸中形成前驱体溶液。在前驱体中加入了 0.05 摩尔(M)的氢氟酸作为 n 型杂质。FTO 薄膜的光学透射率为 82%,薄层电阻为 15 Ω/□。通过在 FTO 的最佳前驱体溶液中细致地加入石墨烯,制备出的样品的导电性能得到了显著改善,从而使薄层电阻降低到 8 Ω/□,光学透过率达到 79%。利用 X 射线衍射、扫描电子显微镜、紫外光谱和四点探针技术研究了制备样品的结构、形态、光学和电学特性。在基底温度为 500℃、喷涂曝光时间为 20 分钟、氟浓度为 2.5 µmole/L 的条件下,FTO 薄膜的性能达到最佳。在最佳 FTO 样品中加入 0.4 µmole/L 的石墨烯后,性能得到了提高,薄膜电阻显著降低到 8 Ω/□,光学透过率降低到 79%。总的功勋值增加到 118.3×10-4 Ω-1。所取得的成果为将制备的薄膜用于电子和光电应用提供了巨大的潜力。
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Preparation and characterization of graphene-based fluorine doped tin dioxide thin films via spray pyrolysis technique
Abstract In this work, fluorine-doped tin oxide (FTO) and graphene/fluorine-doped (G-FTO) thin films were prepared using a low-cost spray pyrolysis method at a substrate temperature of 500 °C. For the FTOs, stannous chloride was dissolved in methanol and acetic acid to form the precursor solution. A 0.05 mole (M) of hydrofluoric acid was added to the precursor as an n-type impurity. The FTO thin film has an optical transmittance of 82% and electrical sheet resistance of 15 Ω/□. By meticulously integrating graphene into the optimal precursor solution of FTO, a significant improvement in the electrical conductivity of the prepared samples was achieved, leading to a reduction in the sheet resistance to 8 Ω/□ with a suitable optical transmittance of 79%. Structural, morphological, optical, and electrical properties of the prepared sample are investigated using X-ray diffraction, scanning electron microscope, UV spectroscopy, and four-point probe technique. The best performance of the FTO thin films is achieved utilizing 2.5 µmole/L of fluorine concentration at a substrate temperature of 500°C for a spraying exposer time of 20 min. The prepared sample has an electrical sheet resistance of 15 Ω/□, optical transmittance of 82%, and figure-of-merit of 91.2×10−4 Ω−1.The addition of 0.4 µmole/L of graphene to the optimum FTO samples enhances the performance by a remarkable reduction in the electrical the sheet resistance to 8 Ω/□ and an acceptable reduction in the optical transmittance of 79%. The overall value of the figure-of-merit increased to 118.3×10−4 Ω−1. The achieved results offer a high potential for adopting the prepared films for electronic and optoelectronic applications.
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